Dual Phase Barrier Layer for Magnetic Memory Thermal Stability

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Solution Overview

Problem

Current semiconductor devices face challenges in achieving stable magnetic characteristics and thermal stability for variable resistance elements, which are crucial for efficient data storage in miniaturized electronic devices with low power consumption and high performance.

Innovation Solution

The implementation of a semiconductor memory device with a dual phase barrier layer having different crystal structures, such as FCC and wurtzite structures, between metal layers, along with a magnetism correction layer to stabilize the magnetic properties and reduce the influence of stray fields, enhancing the thermal stability and performance of the variable resistance element.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional barrier layer with single crystal structure is used, then the device structure is simple, but the thermal stability and magnetic characteristics of the variable resistance element are insufficient

Engineering Contradiction:
Improvethermal stabilityVSAvoidbarrier layer structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The barrier layer is constructed as a composite structure containing two distinct crystal phases (FCC and wurtzite) within the same layer. This composite approach allows the layer to exhibit enhanced thermal stability and magnetic characteristics that neither phase could achieve alone, directly resolving the contradiction between reliability improvement and structural complexity.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

Different regions of the barrier layer possess different crystal structures (FCC in certain regions, wurtzite in others), creating local variations in properties. This local quality differentiation enables the barrier layer to provide both thermal stability and appropriate magnetic characteristics at different locations, improving overall device reliability without requiring a completely complex multi-layer structure.

Inventive Principle:
Principle #3Local quality

2Use of energy by moving object

If the variable resistance element is miniaturized for low power consumption, then power consumption is reduced, but the magnetic characteristics become unstable

Engineering Contradiction:
Improvepower consumptionVSAvoidmagnetic characteristic stability
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The dual-phase barrier layer acts as a stabilizing composite structure that maintains magnetic characteristic stability even when the variable resistance element is miniaturized. The combination of FCC and wurtzite phases provides a robust magnetic environment that prevents instability, allowing the device to achieve low power consumption without sacrificing magnetic reliability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The invention changes the physical and chemical parameters of the barrier layer by introducing a second crystal phase with different properties. This parameter change in the barrier layer compensates for the reduced stability that would normally occur with miniaturization, enabling the variable resistance element to maintain stable magnetic characteristics at smaller dimensions and lower power consumption.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If a magnetism correction layer is added to stabilize magnetic properties, then magnetic characteristic stability is improved, but the device structure becomes more complex

Engineering Contradiction:
Improvemagnetic characteristic stabilityVSAvoidlayer structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The magnetism correction function is merged into the barrier layer itself by incorporating dual crystal phases that inherently provide magnetic stabilization. This eliminates the need for a separate magnetism correction layer, as the barrier layer performs both its primary function and magnetic stabilization, thereby improving reliability without increasing overall device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The dual-phase barrier layer serves multiple functions simultaneously: it provides electrical insulation, thermal stability, and magnetic characteristic stabilization. This multi-functionality reduces the need for additional dedicated layers, maintaining device structural simplicity while achieving improved magnetic stability through the inherent properties of the composite barrier layer.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration maintains a constant normalized perpendicular anisotropy field value with temperature changes, improving the thermal stability and magnetic characteristics of the variable resistance element, thereby enhancing the performance and reliability of the semiconductor memory devices.

Implementation Method 1

maintains a constant normalized perpendicular anisotropy field value with temperature changes

Methodology Applied
Scientific EffectMagnetic anisotropy: Anisotropy

Implementation Method 2

improving the thermal stability and magnetic characteristics

Methodology Applied
Scientific EffectThermal stability:

Implementation Method 3

configured to produce a magnetic field at the first magnetic layer to reduce an influence of a magnetic field of the second magnetic layer

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS10134458B2Electronic device and method for fabricating the same
Publication Date: 2018.11.20 SK HYNIX INC
  • US10134458B2 patent drawing
  • US10134458B2 patent drawing
  • US10134458B2 patent drawing

AI summary

Provided is an electronic device including a semiconductor memory. The semiconductor memory may include: an under layer including first and second metal layers and a barrier layer having a dual phase structure of different crystal structures and interposed between the first and second metal layers; a first magnetic layer positioned over the under layer and having a variable magnetization direction; a tunnel barrier layer positioned over the first magnetic layer; and a second magnetic layer positioned over the tunnel barrier layer and having a pinned magnetization direction, and the under layer may further include a barrier layer having a dual phase structure between the first and second metal layers.