Dual Insulating Plate Chamber Shielding for Heat Loss Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing devices face safety issues due to high temperatures, as heat from the chamber is not effectively shielded, potentially causing burns to operators and inefficient energy use.
Innovation Solution
The substrate processing device incorporates a dual insulating plate system with a first and second insulating plate separated by distances, along with refrigerant suppliers and suction units to create gas insulating layers that minimize heat transfer, and a metal plate with low thermal conductivity to redirect thermal energy, enhancing heat shielding efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the chamber is heated to high temperature for thermal process, then the thermal process can be performed effectively, but safety problems such as burning of operator occur and heat is transmitted to outer space
Solution Approach 1:
The patent introduces a first insulating plate positioned between the chamber and the outer environment, and a second insulating plate positioned outside the first insulating plate. These insulating plates act as intermediary elements that block heat transmission from the heated chamber to the outer space, thereby maintaining high chamber temperature for thermal process while preventing harmful heat transmission to the surroundings.
2Object-affected harmful factors
If two insulating plates are used to block heat from chamber, then heat shielding is provided, but the first insulating plate is in close contact with chamber wall which limits effective shielding
Solution Approach 1:
The patent divides the heat shielding function into two separate insulating plates (first insulating plate and second insulating plate) positioned at different locations. The first insulating plate is positioned between the chamber and the outer environment, while the second insulating plate is positioned outside the first insulating plate. This segmentation allows each plate to contribute to heat shielding independently, improving overall shielding effectiveness compared to a single plate configuration.
Solution Approach 2:
The first insulating plate serves as an intermediary element between the chamber and the second insulating plate, creating a layered heat shielding structure. This intermediary positioning allows the first plate to block some heat transmission while the second plate provides additional shielding, thereby enhancing overall heat shielding effectiveness.
3Strength
If first insulating plate is in close contact with chamber wall, then structural support is provided, but heat of chamber wall is directly transmitted to first insulating plate
Solution Approach 1:
The patent positions the first insulating plate as an intermediary element between the chamber wall and the second insulating plate. By introducing this intermediate layer, the patent reduces direct heat transmission from the chamber wall to the insulating structure, thereby minimizing energy loss while still providing necessary structural support through the dual-plate configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces heat transfer to the outside environment, minimizes temperature loss, and maintains safe operating temperatures, thereby improving safety and energy efficiency.
Implementation Method 1
a gas insulating layer a is defined by the first insulating plate 2, the support 4, and the second insulating plate 3 and is formed between the outer wall of the chamber 1 and an outer space. The gas insulating layer a blocks heat of the chamber 1 from transmitting to the outer space.
Implementation Method 2
a refrigerant circulation channel 50 for circulating a refrigerant is provided in the second insulating plate 30
Data Source
AI summary
Disclosed is a heat shielding device which shields heat from a chamber wall to the outside by creating one or more gas insulating layers around a chamber heated to a high temperature, thereby reducing heat loss, power consumed when heating the chamber to a certain temperature, minimizing the effect of heat to another chamber and reducing safety problems such as burning of an operator.