Dual-Plenum Showerhead for Center-to-Edge Gas Tunability

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Solution Overview

Problem

Existing process showerheads in wafer processing tools distribute process gases at a uniform flow rate over the diameter, lacking the ability to tune the flow rate or composition of gases separately for the center and edge regions.

Innovation Solution

A dual-zone, multiple-plenum showerhead is designed with an inner and outer zone, each containing one or two plenums that are fluidically isolated, allowing for independent control of process gas flow rates and compositions across the center-to-edge area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a uniform gas distribution showerhead is used, then the structure is simple and easy to manufacture, but the ability to tune gas flow rates and compositions separately for center and edge regions is lost

Engineering Contradiction:

Improvetunability of gas flow rates and compositionsVSAvoidshowerhead structure complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The showerhead is divided into multiple independent plenums (e.g., first plenum, second plenum, third plenum) that are fluidically isolated from each other. Each plenum can deliver process gases independently, allowing separate control of gas flow rates and compositions to different regions (center vs. edge) of the substrate, thereby achieving tunability without requiring complex external control systems for each region

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different plenums are positioned to deliver gases to specific local regions of the substrate. For example, the first plenum delivers gas to a center region while the second plenum delivers gas to an edge region. This allows each region to have optimized gas flow rates and compositions tailored to its specific processing requirements, achieving local adaptability

Inventive Principle:

Principle #3Local quality

2Adaptability or versatility

If separate gas delivery systems are provided for center and edge regions, then tunability is achieved, but the device complexity increases

Engineering Contradiction:

Improveindependent control of gas flowsVSAvoidnumber of plenums and fluidic paths

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Multiple plenums are integrated into a single showerhead assembly that processes wafers in a unified vacuum chamber. The plenums share common structural support, mounting interfaces, and control electronics, merging multiple gas delivery functions into one compact device rather than requiring separate delivery systems for each region

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

Each plenum is designed to perform multiple functions: delivering process gases, maintaining vacuum integrity, and providing thermal management. The plenums can also be configured to deliver different gas compositions and flow rates simultaneously, making each component multi-functional and reducing the need for additional specialized components

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS20250163581A1Dual plenum showerhead with center to edge tunability

Publication Date: 2025.05.22 LAM RES CORP

AI summary

A dual-zone process gas distribution showerhead is disclosed. In at least one embodiment, dual-zone showerhead comprises an inner zone and an outer zone surrounding the inner zone. At least a first plenum is within the first zone and coupled to a first gas inlet port. In at least one embodiment, outer zone comprises at least a second plenum coupled to a second gas inlet port. In at least one embodiment, first plenum is coupled to a first plurality of apertures within the inner zone. In at least one embodiment, second plenum is coupled to a second plurality of apertures in the outer zone.