Dual-Portion Fluid Flow Valve for Fast, Precise Flow Control
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Solution Overview
Problem
Conventional fluid distribution systems in manufacturing, such as those used in semiconductor applications, face challenges with slow response times in mass flow controllers (MFCs), high costs, and limited precision, especially for short duration process recipe operations.
Innovation Solution
A fluid flow valve system is introduced, comprising a housing with a first valve portion for proportional control and a second valve portion for isolation, both actuated by a processing device to manage fluid flow based on target data. This system combines the functions of separate isolation and mass flow control valves, reducing complexity and cost while providing quicker response times.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If conventional mass flow controllers (MFCs) are used to proportionally control fluid flow, then flow control function is provided, but response time is slow
Solution Approach 1:
The valve is divided into two distinct valve portions: a first valve portion for proportional flow control and a second valve portion for isolation control. This segmentation allows each portion to be optimized for its specific function, with the first valve portion designed for rapid response and the second for precise isolation, thereby resolving the contradiction between response time and control precision.
2Adaptability or versatility
If separate isolation valves and mass flow controllers are used, then both isolation and proportional control functions are provided, but device complexity increases
Solution Approach 1:
The patent combines the functions of a separate isolation valve and a mass flow controller into a single integrated valve assembly with two valve portions. This merging eliminates the need for multiple discrete components, reducing system complexity while maintaining both isolation and proportional control capabilities.
Solution Approach 2:
The single valve assembly performs multiple functions: the first valve portion provides proportional flow control, the second valve portion provides isolation control, and together they enable both mass flow control and complete shut-off capabilities in one device, achieving multi-functionality without increasing overall system complexity.
3Manufacturing precision
If conventional MFCs are used for fluid flow control, then flow proportioning is achieved, but cost increases
Solution Approach 1:
By merging the isolation valve and MFC functions into a single integrated assembly, the patent reduces the total component count and associated costs. The unified design eliminates the need for separate isolation valves and MFCs, thereby reducing overall system cost while maintaining precise flow control capabilities through the first valve portion.
Data Source
AI summary
Certain embodiments of the present disclosure relate to a fluid flow valve. The fluid flow valve includes a housing configured to receive a flow of fluid. The fluid flow valve further includes a first valve portion configured to proportionally control the flow of fluid through the housing. The fluid flow valve further includes a second valve portion in series with the first valve portion along a fluid flow path within the housing. The second valve portion is configured to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.