Dual-Probe Measuring Apparatus for High-Accuracy Surface Shape Analysis
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Solution Overview
Problem
Existing measuring apparatuses face challenges in achieving high accuracy and short measurement times when measuring the surface shape of objects, as highly accurate measurements require significant time and resources.
Innovation Solution
A measuring apparatus and method that utilize a movable body with non-coplanar surfaces and probes, where the first probe measures one side of the object using Abbe's principle and the second probe measures the other side along the probe axis, allowing for high accuracy and efficiency by aligning the reference point at the intersection of multiple scale axes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If measurement is performed according to Abbe's principle using a single probe, then measurement accuracy is improved, but measurement time increases when measuring multiple points on the surface
Solution Approach 1:
The measuring apparatus divides the measurement task into two independent probes: a first probe for measuring the first surface and a second probe for measuring the second surface. Each probe operates independently to measure its respective surface, allowing simultaneous measurement operations that reduce total measurement time while maintaining Abbe's principle for accuracy.
Solution Approach 2:
The invention introduces a dual-probe configuration where probes are positioned at different spatial locations and orientations. The first probe measures along a first scale axis while the second probe measures along a second scale axis, creating a three-dimensional measurement capability that enables parallel measurement of multiple surfaces without compromising accuracy.
2Productivity
If two measuring probes are arranged to face each other across the measuring object, then measurement time is reduced by measuring both surfaces simultaneously, but measurement accuracy may be compromised
Solution Approach 1:
Each probe is specifically configured for its measurement task with dedicated scale portions and positioning systems. The first probe has a first scale portion for measuring the first surface with high accuracy, while the second probe has a second scale portion for the second surface. This localized optimization ensures that each measurement point maintains high accuracy standards appropriate to its specific measurement location.
Solution Approach 2:
The measuring apparatus integrates multiple measurement functions into a single system. Both probes share common control mechanisms and coordinate systems, allowing the apparatus to perform multiple measurement operations (first surface measurement, second surface measurement, and coordinate transformation) within a unified framework that maintains overall measurement accuracy.
3Measurement precision
If the reference point is positioned at the intersection of multiple scale axes, then measurement accuracy according to Abbe's principle is improved, but device complexity increases
Solution Approach 1:
The invention merges multiple scale axes (first scale axis and second scale axis) into a common reference framework where they intersect at a single reference point. This consolidation allows both probes to reference their measurements to the same origin point, simplifying coordinate transformation and data integration while maintaining high measurement accuracy through the shared reference.
Data Source
AI summary
A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.