Dual Proof-Mass Resonator Anchor Layout for Low Support Loss
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Solution Overview
Problem
Mechanical resonators suffer from high support loss, which degrades their quality factor and makes them susceptible to repeatability and hysteresis issues.
Innovation Solution
The design incorporates two identical proof-masses oscillating in the same phase perpendicular to a connecting beam, with anchors attached to the middle of the connecting beam, minimizing support loss through energy cancellation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If conventional resonator designs are used, then the resonator can be manufactured with standard structures, but the support loss is high which degrades the quality factor
Solution Approach 1:
The patent employs asymmetric anchor positioning where anchors are strategically placed at specific locations along the connecting beam rather than symmetrically. This asymmetric configuration creates destructive interference of acoustic waves propagating into the substrate, thereby reducing support loss and improving quality factor while maintaining manufacturability
Solution Approach 2:
The patent converts the harmful acoustic energy that would normally leak into the substrate and cause support loss into a beneficial effect by using anchor-induced acoustic interference. The anchors are positioned to create destructive interference patterns that cancel out the acoustic waves, transforming the energy loss mechanism into a quality enhancement feature
2Loss of energy
If anchors are attached to reduce support loss, then energy cancellation is improved, but the device complexity increases
Solution Approach 1:
The patent applies local quality by positioning anchors at specific critical locations along the connecting beam where they have maximum impact on acoustic wave cancellation. Rather than uniformly distributing anchors, the design places them at optimized positions that locally address the acoustic leakage problem with minimal anchor count, reducing overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces anchor losses, enhancing the quality factor of the resonator and minimizing repeatability and hysteresis issues.
Implementation Method 1
two identical proof-masses adapted to vibrate in the same phase in a direction perpendicular to a direction of a connecting beam
Implementation Method 2
minimizing support loss through energy cancellation
Implementation Method 3
each of the two resonant plates is made of a piezoelectric material or comprises a semiconductor layer covered by a thin layer of a piezoelectric material
Data Source
AI summary
Mechanical resonator includes two identical proof-masses, at least one connecting beam connecting the two identical proof-masses adapted to oscillate in a same phase in a direction perpendicular to a direction of a connecting beam, and at least one anchor attached to a middle of the at least one connecting beam. Two identical proof-masses are resonant plates, and the at least anchor is anchored to a substrate. The at least anchor may comprise two anchors attached to a middle of the at least one connecting beam in opposite directions. Also, the at least one connecting beam comprises an outer ring at a middle thereof, and the at least anchor is disposed at a center of the outer ring and is connected to the outer ring via two sub-connecting beams. The outer ring may be in a rectangular ring shape. Alternatively, the outer ring may be in a circular ring shape.