Dual Pulsed Power System Independent Voltage Control
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Solution Overview
Problem
Conventional pulsed power systems in deep ultra violet (DUV) lithographic apparatuses lack independent voltage control for each laser discharge chamber, leading to increased power consumption, reduced system reliability, and limited operational modes, as they require synchronized operation of both powertrains and blower systems.
Innovation Solution
A dual pulsed power system with independent voltage and timing control for each laser discharge chamber, allowing for single channel operation, synchronized dual output, and interleaved dual output modes, along with reduced power consumption, achieved through independent charging and voltage regulation circuits for each pulsed powertrain.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If synchronized dual powertrain operation is required, then system reliability is improved, but power consumption increases and operational flexibility is reduced
Solution Approach 1:
The patent divides the dual powertrain system into independently controllable segments. Each powertrain has its own voltage control circuit and timing control circuit, allowing one powertrain to be operated while the other is shut down or serviced. This segmentation enables single-channel operation mode where only one powertrain consumes power, reducing overall power consumption while maintaining system reliability through the ability to quickly switch between channels.
2Reliability
If synchronized dual powertrain operation is required, then system reliability is improved, but operational flexibility is reduced
Solution Approach 1:
The patent implements dynamic control capabilities that allow the system to adapt its operational mode based on real-time requirements. The independent voltage control circuits and timing control circuits enable the system to dynamically switch between synchronized dual operation mode, single-channel operation mode, and interleaved operation mode. This dynamic adaptability provides operational flexibility while maintaining reliability through the ability to switch to redundant single-channel operation when needed.
Solution Approach 2:
The patent changes the control parameters of each powertrain independently through separate voltage control circuits and timing control circuits. This allows different voltage levels, pulse widths, and timing sequences to be applied to each powertrain, enabling diverse operational modes including synchronized operation, single-channel operation, and interleaved operation. These parameter changes provide operational flexibility without compromising system reliability.
3Adaptability or versatility
If independent voltage control circuits are implemented, then operational flexibility is improved, but device complexity increases
Solution Approach 1:
The patent segments the control system into modular independent voltage control circuits and timing control circuits for each powertrain. This modular segmentation, while increasing component count, organizes complexity into manageable, repeatable units that can be independently controlled. The segmented architecture allows operational flexibility through independent control while making the complexity systematic and maintainable.
Solution Approach 2:
The patent designs the independent voltage control circuits and timing control circuits to be universal and multi-functional. Each control circuit can operate in multiple modes (synchronized, single-channel, interleaved) and can service both powertrains through selective activation. This universality reduces the need for entirely separate control systems, thereby limiting the increase in device complexity while maintaining operational flexibility.
4Use of energy by moving object
If single channel operation is enabled, then power consumption is reduced, but system redundancy is reduced
Solution Approach 1:
The patent implements preliminary action by maintaining both powertrains in a ready state with independent control circuits, allowing the system to quickly switch to single-channel operation when power reduction is needed. The independent timing control circuits can pre-synchronize or pre-desynchronize the powertrains as needed. This preliminary preparation allows rapid transition between operational modes, reducing power consumption when single-channel operation is activated while maintaining the capability to restore redundancy quickly if needed.
Data Source
AI summary
Systems, apparatuses, methods, and computer program products are provided for controlling a laser source that includes two laser discharge chambers. An example laser control system can include a first pulsed powertrain including a first independent circuit configured to generate a first resonant charging supply (RCS) output voltage. The first RCS output voltage can be configured to drive a first laser discharge chamber. The example laser control system can further include a second pulsed powertrain including a second independent circuit configured to generate a second RCS output voltage independent from the first RCS output voltage. The second RCS output voltage can be configured to drive a second laser discharge chamber independent from the first laser discharge chamber.