Dual Range MEMS Pressure Sensor with DSP Linearization
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Solution Overview
Problem
Prior art pressure sensors using MEMS transducers struggle to provide a dual-range or multi-range pressure sensing capability, as they cannot autonomously adjust their programming to achieve greater accuracy over narrow pressure ranges, limiting their ability to offer different sensitivities from a single housing attached to a pressurized fluid.
Innovation Solution
A high-precision pressure sensor is developed by mounting multiple MEMS pressure transducers inside a housing, each coupled with a corresponding digital signal processor (DSP) that linearizes the non-linear output signals, allowing for multiple pressure ranges to be sensed and transmitted serially over a data bus, enabling different sensitivities from a single sensor housing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single MEMS pressure transducer with pre-programmed processor is used, then the device complexity is reduced, but the measurement precision and adaptability to different pressure ranges are limited
Solution Approach 1:
The patent divides the pressure sensing function into multiple independent MEMS pressure transducers, each with its own processor. This segmentation allows each transducer to be optimized for specific pressure ranges, improving measurement precision across different ranges while maintaining manageable device complexity through modular architecture.
Solution Approach 2:
The patent creates a multi-functional pressure sensing system where multiple transducers can measure different pressure ranges simultaneously. The system can selectively activate appropriate transducers based on the current pressure range, providing universal pressure measurement capability from low to high pressures with a single integrated device.
2Ease of manufacture
If a single MEMS pressure transducer with fixed programming is used, then the ease of manufacture is improved, but the adaptability to different pressure ranges is reduced
Solution Approach 1:
The patent implements dynamic adaptability by allowing the system to selectively activate different MEMS transducers and their corresponding processors based on the current pressure range. This dynamic configuration enables the sensor to adapt to different pressure measurement requirements without requiring physical reconfiguration or complex manufacturing variations.
Solution Approach 2:
The patent changes the operational parameters of the pressure sensing system by using multiple transducers with different sensitivity calibrations and processing algorithms optimized for specific pressure ranges. This allows the system to maintain ease of manufacture through standardized components while achieving adaptability through parameter optimization for different measurement scenarios.
3Measurement precision
If multiple MEMS pressure transducers with individual processors are used, then the measurement precision and dual-range capability are improved, but the device complexity increases
Solution Approach 1:
The patent merges multiple MEMS pressure transducers and their processors into a single integrated sensor housing, creating a unified dual-range pressure sensing device. This merging approach improves measurement precision across different pressure ranges while managing device complexity through integrated design and shared communication interfaces.
Solution Approach 2:
The patent uses identical or similar MEMS transducer designs for different pressure ranges, copying the basic transducer architecture and optimizing it for specific ranges through calibration and processing algorithms. This copying strategy improves measurement precision across ranges while reducing device complexity by reusing proven designs rather than developing entirely different transducers for each range.
4Device complexity
If prior art pressure sensors with pre-programmed processors are used, then the device complexity is reduced, but the loss of information about different pressure ranges is increased
Solution Approach 1:
The patent segments the pressure measurement function into multiple specialized transducers, each optimized for specific pressure ranges. This segmentation prevents information loss by ensuring that each transducer operates within its optimal range, capturing accurate data across the entire pressure spectrum that a single transducer with fixed programming cannot capture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for a high-precision pressure sensor that can provide accurate measurements across varying pressure ranges, enabling a single sensor to respond to different input pressures with linearized output signals, enhancing measurement precision and flexibility.
Implementation Method 1
a piezoresistive circuit is formed, normally a Wheatstone bridge... Diaphragm deflections caused by pressure applied to the diaphragm change the resistance values of the piezoresistors in the bridge circuit
Data Source
AI summary
A high-precision pressure sensor with two or more pressure ranges is formed from multiple micro-electromechanical system (MEMS) pressure transducers mounted inside a housing and coupled to sense a pressurized fluid. The non-linear outputs of the MEMS pressure transducers are linearized by a corresponding number of processors, preferably DSPs, each processor being coupled to a corresponding MEMS pressure transducer and receiving the MEMS pressure transducer output signal there from. Each processor generates an applied pressure output signal, which is representative of a pressure applied to the MEMS pressure transducer, which is a linearized and digitized version of output signal from the MEMS pressure transducers. The data that is output from multiple processors, each of which outputs pressure data pertaining to a different range of pressures, is transmitted serially on a serial data bus.