Processing Chamber Dual-Seal Support for Vacuum Gas Isolation
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in preventing external gas penetration into the processing chamber, despite sealing measures, which can compromise the integrity of the vacuum environment and affect the quality of semiconductor device manufacturing.
Innovation Solution
The apparatus employs a dual-seal system with a support member made of a harder material than the seal members, positioned between the first and second seal members, to maintain a non-contact state between the upper and lower containers, ensuring effective sealing and reducing the risk of external gas intrusion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a seal member is used to seal the gap between the upper container and lower container, then the sealing function is improved, but external gas may still penetrate into the processing chamber
Solution Approach 1:
The sealing system is divided into multiple independent seal members (first seal member and second seal member) positioned at different locations. This segmentation allows each seal member to independently prevent gas penetration, and the support member is also segmented into multiple regions (seal member support region and non-support region) to provide differential support.
Solution Approach 2:
The support member acts as an intermediary element between the upper container and lower container, providing mechanical support to the seal members. By positioning the support member's highest point between the first and second seal members, it indirectly supports both seal members without direct contact, enhancing sealing reliability while preventing external gas penetration.
2Stability of the object's composition
If the support member supports the upper container directly, then the upper container is stabilized, but the seal members may deform due to concentrated pressure
Solution Approach 1:
The support member exhibits local quality variation through its geometric design: it has a highest point positioned between the first and second seal members, creating a non-uniform support surface. This local quality difference allows the support member to provide support while avoiding concentrated pressure on the seal members, preventing deformation and maintaining both stability and seal integrity.
3Reliability
If the upper container is pressed downward by the flange retainer, then the sealing pressure is improved, but the upper container may incline or rotate
Solution Approach 1:
The support member acts as a counterbalancing element that opposes the downward pressing force from the flange retainer. By positioning the support member's highest point between the seal members, it creates an opposing support force that prevents the upper container from inclining or rotating, thereby maintaining proper orientation while preserving sealing pressure.
Data Source
AI summary
There is provided a technique that includes: an upper container; a lower container provided below the upper container and constituting a processing chamber between the lower container and the upper container; a first seal portion disposed in a boundary region between the upper container and the lower container, the first seal portion including a first seal member and a second seal member; and a support that includes a support face disposed at a highest position below the upper container, is provided between the first seal member and the second seal member in a horizontal direction, and is made of a material harder than the first seal member and the second seal member.