Dual-series Varactor EPI Vertical Stacking

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Solution Overview

Problem

Conventional varactor diode structures require large areas on substrates due to the need for multiple stacked diodes, leading to increased size and cost in RF circuitry, and suffer from slow response times due to high time constants associated with large resistance and capacitance values.

Innovation Solution

A dual-stack varactor configuration where two varactor diodes are vertically disposed over each other, reducing the overall footprint and allowing for a higher density of diodes per unit area, and a series-connected configuration that decreases the effective resistance and capacitance, thereby reducing the time constant and improving response time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If multiple varactor diodes are stacked in conventional configurations, then the number of diodes per unit area increases, but the overall area occupied on the substrate increases and the response time decreases due to high time constants

Engineering Contradiction:
Improvenumber of diodes per unit areaVSAvoidarea occupied on substrate
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent transitions from planar stacking to three-dimensional vertical stacking of varactor diodes. Multiple diodes are stacked along the vertical dimension (z-axis) using epitaxial growth, allowing 5-7 diodes to be integrated in a compact footprint comparable to or smaller than conventional planar configurations. This dimensional transition enables higher diode density without proportionally increasing substrate area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If multiple varactor diodes are stacked in conventional configurations, then the number of diodes per unit area increases, but the response time decreases due to high time constants associated with large resistance and capacitance values

Engineering Contradiction:
Improvenumber of diodes per unit areaVSAvoidresponse time
Core Design Contradiction:
Quantity of substanceVSLoss of time

Solution Approach 1:

The vertical stacking configuration reduces the effective resistance and capacitance values by distributing the electrical characteristics across multiple series-connected diodes in the vertical dimension. This results in a lower overall time constant (τ=RC) compared to planar configurations, thereby improving the response time of the varactor array.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Device complexity

If conventional varactor diode structures are used, then the design is simpler, but the size and cost of RF circuitry increases

Engineering Contradiction:
Improvedesign complexityVSAvoidsize of RF circuitry
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The vertical stacking approach achieves higher diode density (5-7 diodes per unit area) in a compact three-dimensional structure, reducing the overall footprint of RF circuitry. While the epitaxial growth process adds manufacturing complexity, the reduced area leads to lower material costs and improved integration efficiency compared to conventional planar structures.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The dual-stack varactor configuration significantly reduces the size and cost of varactor circuitry by doubling the number of diodes per unit area and enhancing the response time by minimizing the time constant, thus addressing the limitations of conventional varactor diode structures.

Implementation Method 1

the bias voltage VBIAS, which is a reverse-bias voltage, controls a width WDR of a depletion region within a P-N junction of the varactor diode 10

Methodology Applied
Scientific EffectDepletion region modulation: Capacitance

Implementation Method 2

The width WDR of the depletion region is in turn inversely proportional to the capacitance CD across the varactor diode 10

Methodology Applied
Scientific EffectP-N junction capacitance effect: Capacitance

Data Source

PatentUS10833071B2Dual-series varactor EPI
Publication Date: 2020.11.10 QORVO US INC
  • US10833071B2 patent drawing
  • US10833071B2 patent drawing
  • US10833071B2 patent drawing

AI summary

A semiconductor device includes a first varactor diode and a second varactor diode. The second varactor diode is coupled in series with the first varactor diode and vertically disposed over the first varactor diode. By vertically disposing the second varactor diode over the first varactor diode, the space occupied by the pair of varactor diodes can be significantly reduced.