3D Memory Device With Dual-Side Silicon Pillar Integration
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Solution Overview
Problem
Current memory devices face challenges in achieving high bit integration density due to limitations in three-dimensional stacking of memory cells, which affects data storage and retrieval efficiency.
Innovation Solution
The memory device incorporates a semiconductor member with memory elements on both sides, utilizing a control unit to apply specific voltages to electrode films, enabling efficient data reading and writing by maintaining the silicon pillar in a common state across memory element strings, thus improving integration density without the need for additional insulation regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If three-dimensional stacking of memory cells is implemented to increase integration degree, then bit integration density is improved, but manufacturing complexity and insulation requirements increase
Solution Approach 1:
The patent merges the insulation function into the common substrate structure itself, rather than adding separate insulation layers between stacked memory cells. The substrate is designed with inherent insulation properties that prevent interference between adjacent memory element strings, eliminating the need for additional insulation regions and reducing manufacturing complexity while maintaining high bit integration density
Solution Approach 2:
The common substrate serves multiple functions simultaneously: it provides mechanical support, electrical connection, and insulation between memory element strings. This multi-functional design reduces the number of separate components needed and simplifies the overall device structure while enabling three-dimensional stacking for increased integration density
2Quantity of substance
If memory elements are stacked three-dimensionally on both sides of semiconductor members, then storage capacity increases, but data reading and writing control complexity increases
Solution Approach 1:
The patent segments the control mechanism by providing separate control units for memory elements on opposite sides of the substrate. Each control unit independently manages voltage application to its respective memory elements, simplifying the control architecture while enabling three-dimensional stacking. This segmentation allows parallel operation of multiple memory elements without complex cross-interference control
Solution Approach 2:
The patent maintains equipotential conditions by applying appropriate voltages to common structures (such as common bit lines and word lines) that are shared between memory elements on opposite sides. This ensures that voltage potentials are properly managed during read and write operations, preventing interference between stacked memory elements while maintaining storage capacity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances bit integration density by allowing common use of silicon pillars between memory element strings, reducing the occupied area for insulation and improving manufacturing efficiency, while maintaining normal data storage and retrieval operations.
Implementation Method 1
the first memory element including a first charge storage layer provided between the first side of the semiconductor member and a first electrode film
Data Source
AI summary
A memory device includes a first memory element provided on a first side of a semiconductor member, the first memory element including a first charge storage layer provided between the first side of the semiconductor member and a first electrode film, the semiconductor member extending to a first direction, the first side of the semiconductor member being along the first direction; a second memory element on a second side of the semiconductor member, the second memory element including a second charge storage layer provided between the second side of the semiconductor member and a second electrode film, the second side being opposed on the first side with the semiconductor member; a cell source line connected to an end of the semiconductor member; and a control unit. The control unit is configured to, when reading out a data from the first memory element, apply a first voltage to the second electrode film, the first voltage being negative with respect to a voltage of the cell source line, and apply a second voltage to the first electrode film, the second voltage being positive with respect to the voltage of the cell source line.


