Dual-Sided Micro Heat Flux Sensor Array With Low Heat Resistance
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Solution Overview
Problem
Conventional heat flux sensors on semiconductor chips act as heat resistances, making it difficult to accurately measure heat flux and determine heat transfer routes, as they alter the heat transfer path.
Innovation Solution
A micro heat flux sensor array is designed with a substrate, first and second sensors on opposite sides, each comprising a conductive wiring pattern layer and an insulating layer with via holes for contact, and optionally grooves or protrusions to reduce heat resistance and enhance conductivity, allowing for accurate measurement of heat flux in all directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional heat flux sensors are placed on the surface of a semiconductor chip, then heat flux measurement is enabled, but the sensors act as heat resistances that alter the heat transfer route and reduce measurement accuracy
Solution Approach 1:
The patent transitions from single-sided surface mounting to dual-sided sensor arrangement, placing sensors on both the upper and lower surfaces of the substrate. This dimensional change allows heat flux measurement in multiple directions (vertical and horizontal) simultaneously, reducing the interference effect on heat transfer routes while maintaining measurement accuracy.
Solution Approach 2:
The sensor array is divided into multiple independent sensing elements distributed across both sides of the substrate. Each sensor element measures local heat flux independently, and the combined data provides comprehensive heat transfer analysis without any single sensor creating significant thermal resistance interference.
2Loss of information
If conventional heat flux sensors are used, then heat flux measurement is possible, but it becomes difficult to determine the actual heat transfer route as the sensor alters the heat flow path
Solution Approach 1:
By arranging sensors on both sides of the substrate in a dual-layer configuration, the system captures heat flux data from multiple spatial dimensions. This enables reconstruction of the complete heat transfer route information without losing data about the original heat flow path, as sensors on opposite sides detect heat flow in opposite directions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The micro heat flux sensor array effectively reduces heat resistance and enables precise measurement of both horizontal and vertical heat flux, improving the accuracy of heat transfer analysis in semiconductor devices.
Implementation Method 1
a first wiring pattern layer of a first conductive material, a second wiring pattern layer of a second conductive material contacting the first wiring pattern layer
Data Source
AI summary
Provided is a micro heat flux sensor array having reduced heat resistance. A micro heat flux sensor array may include a substrate, a plurality of first sensors formed on a first side of the substrate, and a plurality of second sensors formed on a second side of the substrate. Each of the plurality of first and second sensors may include a first wiring pattern layer of a first conductive material, a second wiring pattern layer of a second conductive material contacting the first wiring pattern layer, and an insulating layer in contact with the first and second wiring patterns.