Dual-Sided MEMS Mirror for LiDAR Beam Steering and Orientation
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Solution Overview
Problem
Current LiDAR systems face challenges in increasing the speed and accuracy of mirror position determination in micro-electromechanical systems (MEMS) used for steering pulsed light sources, which is crucial for precise object detection and environment scanning in vehicles.
Innovation Solution
A micro-electromechanical system (MEMS) package with a dual-sided mirror that includes a substrate with apertures and transparent windows, allowing for the simultaneous steering of LiDAR and sensing beams, enabling the detection of the mirror's orientation and thus the direction of the LiDAR beam, using electrical signals to pivot the mirror about orthogonal axes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single light source is steered by a manipulable mirror in MEMS, then the scanning speed and coverage are improved, but the accuracy of mirror position determination deteriorates
Solution Approach 1:
The single mirror is segmented into two separate mirrors: a first mirror for steering the LiDAR light beam and a second mirror for steering the sensing light beam. This segmentation allows independent optimization of each mirror's function, enabling high-speed scanning with the LiDAR beam while accurately determining mirror orientation using the sensing beam
Solution Approach 2:
A sensing light beam is introduced as an intermediary to indirectly measure the mirror's orientation. The sensing beam reflects off the mirror and is detected by a detector array, providing precise positional information about the mirror without interfering with the primary LiDAR scanning function
2Measurement precision
If the mirror orientation is precisely controlled for accurate LiDAR beam direction, then the object detection fidelity is improved, but the system complexity increases
Solution Approach 1:
The LiDAR system and the mirror orientation sensing system are merged into a single integrated optical path. Both the LiDAR light beam and the sensing light beam use the same mirror for steering, allowing simultaneous acquisition of range data and mirror position data without requiring separate steering mechanisms
Solution Approach 2:
The single manipulable mirror serves multiple functions: it steers the LiDAR light beam for distance measurement and simultaneously steers the sensing light beam for orientation detection. This multi-functionality reduces system complexity by eliminating the need for separate mirrors or actuators for each function
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the speed and accuracy of LiDAR systems by allowing precise control over the mirror's orientation, improving the fidelity of object detection and environmental scanning, particularly in autonomous driving applications.
Implementation Method 1
a first reflective surface positioned opposite and spaced apart from a second reflective surface... allowing a LiDAR light beam to pass through and be reflected off the first reflective surface
Data Source
AI summary
Methods and systems for using a dual sided MEMS mirror for determining a direction of steered light are disclosed. In one example a MEMS package includes a substrate defining an aperture and a dual sided MEMS mirror is positioned over the aperture. A first surface of the MEMS mirror is used to steer a LiDAR beam that is used to perform LiDAR imaging of an area of interest. As the mirror is moved, a second surface of the mirror reflects a sensing beam onto a detector array. Data from the detector array is used to determine an orientation of the mirror which can then be used to determine a direction of the steered LiDAR beam. The MEMS package can form an enclosure for the MEMS mirror that includes a first and a second transparent window attached to two opposing surfaces of the substrate.