Dual-Sided MEMS Mirror for LiDAR Position Sensing
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Solution Overview
Problem
Current LiDAR systems face challenges in accurately and efficiently steering the mirror to improve scanning speed and accuracy, which is crucial for real-time object detection and environment mapping in applications like autonomous driving.
Innovation Solution
A micro-electromechanical system (MEMS) package with a dual-sided mirror and a position-sensitive device that steers the LiDAR beam by reflecting it off both sides of the mirror, allowing for precise control of the mirror's orientation and direction, enabling faster and more accurate scanning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a single light source is steered by reflecting off a manipulable mirror, then the scanning coverage is improved, but the accuracy of determining mirror position deteriorates
Solution Approach 1:
The mirror is segmented into two separate reflective surfaces (first and second reflective surfaces) that can be independently controlled. This allows one surface to handle the scanning function while the other surface is dedicated to position sensing, thereby resolving the contradiction between scanning coverage and position measurement accuracy.
Solution Approach 2:
The dual-sided mirror structure enables the single MEMS device to perform multiple functions: one reflective surface is optimized for steering the main light source to achieve wide scanning coverage, while the other surface is optimized for reflecting sensing beams to accurately determine mirror position. This multi-functionality resolves the trade-off between coverage and precision.
2Productivity
If the mirror orientation is controlled to increase scanning speed, then the productivity is improved, but the measurement precision of mirror position deteriorates
Solution Approach 1:
By segmenting the mirror into two independently controllable reflective surfaces, the system can optimize one surface for high-speed scanning while the other surface is dedicated to position sensing. This segmentation allows simultaneous achievement of high scanning speed and high position measurement precision.
Solution Approach 2:
A position sensing beam is introduced as an intermediary element that reflects off the second reflective surface to provide feedback on mirror position. This intermediary sensing mechanism enables accurate position measurement without interfering with the high-speed scanning performed by the first reflective surface.
3Device complexity
If a position sensitive device is integrated into the package base, then the device complexity is reduced, but the manufacturing precision requirements increase
Solution Approach 1:
The position sensitive device is merged with the package base into a single integrated component. This consolidation reduces the overall device complexity by eliminating separate mounting structures and alignment mechanisms, while the hermetic sealing process ensures the required manufacturing precision is achieved through standardized fabrication techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the scanning speed and accuracy of LiDAR systems, improving their ability to detect objects and map environments effectively, particularly in real-time applications such as autonomous driving.
Implementation Method 1
a position sensitive device is arranged to receive a reflected sensing beam reflected from the second reflective surface
Data Source
AI summary
Methods and systems for using a dual sided MEMS mirror for determining a direction of a LiDAR beam are disclosed. In one example a MEMS package includes a dual sided MEMS mirror that is manipulable about two orthogonal axes. A first surface of the MEMS mirror is used to steer a LiDAR beam that is used to perform LiDAR imaging of an area of interest. As the mirror is moved, a second surface of the mirror reflects a sensing beam onto a position sensitive device. Data from the position sensitive device is used to determine a position of the mirror which can be used to determine a direction of the steered LiDAR beam.