Dual Sided Workpiece Assembly Rotation for Ion Processing
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Solution Overview
Problem
Conventional workpiece handling equipment for ion processing tools is inefficient in handling dual sided workpieces, as it requires removal and reinsertion of the workpiece to treat both sides, leading to reduced throughput and reliability due to the time-consuming handling operations.
Innovation Solution
A processing apparatus with a dual sided workpiece assembly that includes a base and flip portion, allowing the workpiece to rotate about a flipping axis, enabling both sides of the workpiece to be treated within the process chamber without removal, with a controller managing the ion exposure times for each side.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional workpiece handling equipment removes and reinserts dual sided workpieces to treat both sides, then both sides can be treated, but processing time increases and throughput decreases
Solution Approach 1:
The workpiece holder incorporates a rotating mechanism that dynamically changes the orientation of the workpiece during processing. The holder can rotate between 0 degrees (first side facing treatment source) and 180 degrees (second side facing treatment source), enabling both sides to be treated without removing the workpiece from the chamber.
Solution Approach 2:
The solution adds a rotational dimension to the workpiece holder, transforming it from a static support structure to a dynamically adjustable one. This rotational degree of freedom allows the workpiece to present different sides to the treatment source while remaining in the same spatial location within the processing chamber.
2Ease of operation
If conventional equipment removes workpieces from vacuum chamber for reorientation, then both sides can be accessed, but handling operations increase reliability risks
Solution Approach 1:
The workpiece holder includes a rotational mechanism that enables dynamic reorientation of the workpiece while it remains secured within the vacuum chamber. This eliminates the need for external handling operations that would expose the workpiece to contamination risks and mechanical damage during transfer.
Solution Approach 2:
The rotatable workpiece holder acts as an intermediary mechanism between the workpiece and the treatment source. Instead of manually manipulating the workpiece itself, the holder rotates to present different sides of the workpiece to the treatment source, thereby protecting the workpiece from direct handling.
3Reliability
If workpieces are removed and reinserted between side treatments, then both sides receive treatment, but processing time increases
Solution Approach 1:
The workpiece holder is designed with a rotational capability that allows it to pivot between orientations during the processing cycle. The holder rotates 180 degrees to switch between treating the first side and the second side of the workpiece, enabling both sides to be treated in a single continuous operation without removal from the chamber.
Solution Approach 2:
The rotational mechanism enables continuous processing by maintaining the workpiece in the treatment chamber throughout both sides' treatment. The workpiece holder rotates smoothly between orientations without interrupting the vacuum environment or requiring workpiece removal, thereby eliminating idle time associated with handling operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for efficient and reliable processing of both sides of dual sided workpieces in situ, significantly improving throughput by maintaining the workpieces within the vacuum environment and reducing handling-related inefficiencies.
Implementation Method 1
expose a first side of the at least one dual sided workpiece to accelerating ions in the process chamber
Data Source
AI summary
A processing apparatus includes a process chamber defining an enclosed volume, and a dual sided workpiece assembly disposed in the enclosed volume. The dual sided workpiece assembly includes a base portion and a flip portion coupled to the base portion. The flip portion has a support surface configured to support at least one dual sided workpiece and is configured to rotate about a flipping axis. The processing apparatus also includes a controller configured to control the dual sided workpiece assembly to expose a first side of the at least one dual sided workpiece to accelerating ions in the process chamber during a first time interval and to expose a second side of the at least one dual sided workpiece to accelerating ions during a second time interval different than the first time interval by rotating the flip portion about the flipping axis.