Dual Slider Interface for Charged Particle Beam Control

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Solution Overview

Problem

Existing charged particle beam apparatuses face difficulties in accurately stopping the changing set values during operation control, leading to repeated adjustments, especially in fine-tuning settings for devices like scanning electron microscopes.

Innovation Solution

The apparatus includes a first and second adjustment slider on a graphic user interface, where the second slider moves interlockingly with the first, with a shorter movement distance within the displayed range, and remains stationary when at the ends, allowing precise control over set values such as focus, magnification, and astigmatism.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a single slider is used to adjust set values continuously, then the set value can be changed smoothly, but it becomes difficult to stop at the target value requiring repeated adjustments

Engineering Contradiction:
Improvesmooth adjustmentVSAvoidstopping precision
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The adjustment slider is divided into two separate components: a first slider for coarse adjustment and a second slider for fine adjustment. This segmentation allows independent control of adjustment magnitude, enabling smooth transitions while precisely stopping at target values.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system dynamically switches between coarse and fine adjustment modes based on proximity to the target value. When the first slider approaches the target, the system transitions to the second slider for precise stopping, making the adjustment process adaptive to the current state.

Inventive Principle:
Principle #15Dynamics

2Adaptability or versatility

If the adjustment range is made very wide to cover all operational settings, then all settings can be adjusted, but both coarse and fine adjustments are necessary increasing complexity

Engineering Contradiction:
Improveadjustment rangeVSAvoidadjustment mechanism
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The adjustment mechanism adds a temporal dimension to the control interface by sequencing adjustments: the first slider handles the initial coarse adjustment phase, and the second slider handles the subsequent fine adjustment phase. This dimensional separation simplifies the overall complexity despite the wide adjustment range.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Speed

If the marker displacement is continuously converted to changing speed, then the set value changes smoothly, but the set value cannot be stopped at the target value

Engineering Contradiction:
Improvevalue changing speedVSAvoidtarget value accuracy
Core Design Contradiction:
SpeedVSMeasurement precision

Solution Approach 1:

The system uses periodic switching between two adjustment phases: first the coarse adjustment phase with the first slider, then the fine adjustment phase with the second slider. This periodic action allows smooth changes during each phase while achieving precise stopping at the target through the phase transition.

Inventive Principle:
Principle #19Periodic action

Data Source

PatentUS9412557B2Charged particle beam apparatus and program
Publication Date: 2016.08.09 HITACHI HIGH TECH CORP
  • US9412557B2 patent drawing
  • US9412557B2 patent drawing
  • US9412557B2 patent drawing

AI summary

The movement distance of a second adjustment slider 204 is made shorter than that of a first adjustment slider 205 if the first adjustment slider 205 is positioned in a displayed range, except at both ends thereof, of a set value adjustment axis 203 in a first set value adjustment axis display part 202. The first adjustment slider 205 is kept unmoved while the second adjustment slider 204 alone is moved in the direction of one of both ends of the displayed range if the first adjustment slider 205 is positioned at least at the one of both ends of the displayed range of the set value adjustment axis 203 in the first set value adjustment axis display part 202, if the second adjustment slider 204 is also positioned in the displayed range except at the both ends thereof, and if the first adjustment slider 205 is to be selectively operated by a cursor 220. This structure allows coarse and fine adjustments of set values for operation control to be carried out easily and accurately.