Dual-Slider Stage Support to Prevent Guide Tilting and Galling
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Solution Overview
Problem
In stack-type stage apparatuses used in semiconductor manufacturing, the fluctuation of load on the first guide causes tilting and potential galling when the first slider moves, leading to contact between the second slider and guide, which results in mechanical issues.
Innovation Solution
The stage apparatus incorporates a Y-axis slider with two slider parts separated in the first direction, supported by a connecting portion, and guided by a second guide, which increases support span and rigidity, preventing galling by maintaining non-contact movement with the guide.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single second slider supports the first guide, then the structure is simple, but the support span is insufficient causing tilting and galling
Solution Approach 1:
The second slider is divided into two separate slider parts (first slider part and second slider part) that are separated in the first direction. Each slider part independently supports one end of the first guide, creating two distinct support points. This segmentation increases the support span and prevents tilting while avoiding the complexity of a single complex slider structure.
2Reliability
If the support span of the first guide is increased, then tilting and galling are prevented, but the device complexity increases
Solution Approach 1:
The second slider is segmented into two independent slider parts positioned at opposite ends of the first guide. This segmentation naturally increases the support span without requiring additional complex mechanisms, achieving galling prevention through a relatively simple configurational change.
Solution Approach 2:
The two slider parts are both supported by the same second guide, merging their support function into a single guide structure. This combining approach increases support span while avoiding the complexity of multiple independent guide structures.
3Ease of operation
If the first guide tilts during movement, then the mechanism is simpler, but contact between second slider and guide occurs causing mechanical issues
Solution Approach 1:
By segmenting the second slider into two parts separated in the first direction, the support span is increased which stabilizes the first guide and prevents tilting during movement. This eliminates contact between the second slider parts and the second guide while maintaining smooth movement operation.
Solution Approach 2:
The slider parts are separated in the first direction (horizontal dimension) rather than increasing vertical support height. This dimensional approach increases support span and prevents tilting without adding vertical complexity, maintaining ease of operation while improving reliability.
Data Source
AI summary
A stage apparatus includes a first slider, a first guide that guides movement of the first slider in a first direction, a second slider that includes two slider parts separated from each other in the first direction and supporting the first guide from below, and a second guide that guides movement of the second slider.