Dual-Stage Chemical Liquid Filtration Device for Extended Pot Life
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Solution Overview
Problem
Current filtering devices used in semiconductor manufacturing, particularly for chemical liquids, face challenges in achieving both excellent performance and extended pot life due to the short lifespan of filter media.
Innovation Solution
A filtering device is designed with a dual-filter unit configuration, where the first filter unit and second filter unit are independently disposed in a pipeline, with specific pore size distributions and materials, including nylon nanofiber layers and polyamide membranes, to enhance impurity removal and extend filter media lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single filter unit with high filtration performance is used, then impurity removal is improved, but the pot life of the filter medium becomes short
Solution Approach 1:
The filtering device is divided into multiple independent filter units (first filter unit, second filter unit, third filter unit), each with different pore size distributions. This segmentation allows each filter unit to handle different stages of filtration, distributing the filtration load and preventing any single filter from becoming clogged too quickly, thereby extending overall pot life while maintaining high impurity removal performance.
Solution Approach 2:
Each filter unit is designed with specific local qualities - different pore size distributions tailored to specific filtration stages. The first filter unit has a first pore size distribution optimized for initial filtration, the second has a second pore size distribution for intermediate filtration, and the third has a third pore size distribution for final polishing. This local optimization ensures each filter operates at peak efficiency for its specific function.
2Duration of action of stationary object
If multiple filter units with different pore sizes are used, then filter media lifespan is extended, but device complexity increases
Solution Approach 1:
The device is segmented into modular filter units that can be independently configured and maintained. Each unit is a self-contained module with specific pore size characteristics, allowing for independent replacement and maintenance without affecting other units, thus managing complexity through standardization and modularity.
Solution Approach 2:
The multiple filter units with different pore size distributions serve multiple functions within a single system - coarse filtration, intermediate filtration, and fine polishing. This multi-functionality approach consolidates what could be separate filtration systems into one integrated device, managing complexity while achieving extended pot life through functional differentiation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prolongs the pot life of filter media while maintaining excellent performance by optimizing pore size distributions and materials, leading to improved impurity removal and extended filtration efficiency.
Implementation Method 1
a filter medium including a non-sieving membrane layer having a predetermined pore size distribution, a sieving membrane layer having a predetermined pore size distribution, and a nylon nanofiber layer which has a predetermined pore size distribution
Data Source
AI summary
An object of the present invention is to provide a filtering device which makes it possible to obtain a chemical liquid having excellent performance and enables filter media to have sufficiently long pot life. Another object of the present invention is to provide a purification device, a chemical liquid manufacturing device, a filtered substance to be purified, a chemical liquid, and an actinic ray-sensitive or radiation-sensitive resin composition. A filtering device according to an embodiment of the present invention has a first filter unit including a first filter, which satisfies at least one condition selected from the group consisting of following conditions 1 to 3, and a housing accommodating the first filter and a second filter unit including a second filter different from the first filter and a housing accommodating the second filter, in which the first filter unit and the second filter unit are independently disposed in a pipe line through which a substance to be purified is supplied.Condition 1: the filter has a filter medium including two or more layers containing materials different from each other.Condition 2: the filter has a filter medium including two or more layers having different pore structures.Condition 3: the filter has a filter medium including one layer in which different materials are mixed together.