Dual Substrate MEMS Switch with Hermetic Seal
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Solution Overview
Problem
Existing MEMS switch designs require a thin, delicate top substrate that is prone to damage during fabrication and often necessitate a multi-chip solution with complex signal routing, which is not ideal for compact and reliable operation.
Innovation Solution
The development of an electrostatic MEMS plate switch using dual substrates, where a deformable plate with shunt bars is formed on one substrate and electrical contacts on another, allowing for a hermetic seal and independent formation of components to enhance reliability and compactness, with spring beams providing adjustable restoring forces and improved contact stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a thin top substrate is used to enable electrostatic deflection, then the switch can be actuated, but the substrate becomes delicate and susceptible to damage during fabrication and operation
Solution Approach 1:
The device is divided into two separate substrates: a first substrate containing the deformable plate and spring beams, and a second substrate containing the fixed electrode and contacts. This segmentation allows each substrate to be optimized independently - the first substrate can be thin for fast actuation while the second substrate provides structural support, eliminating the need for a thick moveable substrate and resolving the contradiction between switching speed and substrate durability.
2Adaptability or versatility
If a multi-chip solution is used to provide driver circuits, then functionality is improved, but device complexity and signal routing complexity increase
Solution Approach 1:
The patent integrates the driver circuit functionality directly onto the second substrate alongside the fixed electrode and contacts. This merging of components into a single substrate reduces the need for separate driver chips and complex inter-chip signal routing, while still providing the necessary electrostatic actuation capability. The result is a more compact device with simplified signal paths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables a more compact, reliable, and robust MEMS switch with improved contact stability and reduced susceptibility to damage, capable of operating across a wide frequency range (DC to 10 GHz) with enhanced switching speed and reduced damping effects.
Implementation Method 1
applying a voltage between the moveable electrode and the fixed electrode, the moveable substrate is attracted to the fixed substrate
Implementation Method 2
spring beams providing adjustable restoring forces and improved contact stability
Data Source
AI summary
Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.