Dual-Substrate Piezoresistive Sensor for High Sensitivity Force Detection
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Solution Overview
Problem
Current piezoresistive force measuring sensors lack sufficient sensitivity to detect weaker forces, limiting their accuracy in high-precision applications.
Innovation Solution
A sensor design combining thru-mode and shunt-mode configurations with a unique arrangement of electrodes and force-sensitive elements on separate substrates, allowing for increased sensitivity and reduced interference, along with a method of manufacturing that reduces material usage and costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If shunt-mode FSR design is used with both electrodes on the same substrate, then ease of manufacture is improved, but sensitivity to weaker forces deteriorates
Solution Approach 1:
The sensor is divided into two separate substrates: first substrate containing inlet electrodes and force-sensitive elements, second substrate containing outlet electrodes. This segmentation allows optimization of each substrate's function independently, improving sensitivity to weak forces while maintaining manufacturing feasibility through separate production and subsequent assembly.
2Measurement precision
If thru-mode FSR design is used with electrodes on separate substrates, then sensitivity to weaker forces is improved, but device complexity increases
Solution Approach 1:
The patent combines shunt-mode and thru-mode configurations into a hybrid design where force-sensitive elements are positioned between inlet and outlet electrodes across two substrates. This merging approach achieves high sensitivity to weak forces while simplifying the overall structure compared to traditional thru-mode designs, as the force-sensitive elements directly bridge the electrode pairs.
3Measurement precision
If force-sensitive elements are arranged to cover electrodes on separate substrates, then sensitivity is improved twenty times, but manufacturing precision requirements increase
Solution Approach 1:
The force-sensitive elements are pre-positioned and fixed on the first substrate before assembly with the second substrate. This preliminary action ensures precise alignment and coverage over the inlet electrodes, achieving the required twenty-fold sensitivity improvement while managing manufacturing precision through a staged production process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves a sensitivity twenty times higher than existing designs, capable of detecting forces from 0.5 Newtons to 5 Newtons with improved linearity and reduced material costs, enabling precise measurement of weak forces.
Implementation Method 1
The present invention relates to a homogenized and highly sensitive sensor which uses piezoresistive effects for measuring a force.
Data Source
AI summary
A sensor measuring forces, a method for manufacturing a sensor and a method for measuring a force are disclosed. The sensor comprises a first substrate and a second substrate arranged at a distance in a planar manner from each other. A plurality of first electrodes is disposed apart from each other at a first distance on an inner side of the first substrate and a plurality of force-sensitive elements arranged on the inner side of the first substrate and covers at least a part of individual ones of the plurality of first electrodes. A second electrode is arranged on an inner side of the second substrate and extends across at least ones of the plurality of the force-sensitive elements. The second electrode of the second substrate is thereby in direct contact with the plurality of force-sensitive elements of the first substrate.