Dual-Substrate Sensor With Optical Cap For Signal Amplification
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Solution Overview
Problem
Existing electromagnetic radiation sensors, particularly thermal radiation sensors, face challenges in handling fragility, heat loss due to gas convection and conduction, and the need for focused radiation to amplify signals, which are not adequately addressed by current technologies.
Innovation Solution
A sensor device is manufactured using two substrates, where one substrate contains sensing elements and a cap is formed on a separate substrate, bonded under controlled conditions to create sealed cells with differing response characteristics, allowing for focused radiation and improved signal amplification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a protective cap is provided over the sensor to isolate it from the ambient environment, then the sensor's reliability is improved, but the sensor's fragility handling becomes more complex
Solution Approach 1:
The sensor device is divided into two separate substrates: a first substrate containing the sensor element and a second substrate containing the cap. These substrates are bonded together to form a sealed cell, allowing the sensor to be protected while simplifying handling during manufacturing and operation.
Solution Approach 2:
The sensor element is nested within the sealed cell formed by bonding the first substrate (containing the sensor) to the second substrate (containing the cap). This nested structure provides protection while maintaining a compact, manageable form factor.
2Device complexity
If the sensor is exposed to the ambient environment, then the device complexity is reduced, but heat loss due to gas convection and conduction increases
Solution Approach 1:
The harmful factor (ambient gas causing heat loss through convection and conduction) is extracted from the sensor environment by sealing the sensor element within a controlled cell, isolating it from the ambient environment that causes energy loss.
Solution Approach 2:
The sensor element is placed in a sealed cell environment that is isolated from the ambient atmosphere, effectively creating an inert environment that prevents heat loss through gas convection and conduction, thereby reducing energy loss.
3Measurement precision
If radiation is focused onto the sensor element to amplify signals, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The cap and the sensor element are merged into a single integrated sealed cell structure through bonding, combining the optical focusing function (cap) with the detection function (sensor element) in one compact unit, thereby improving signal detection without proportionally increasing overall device complexity.
4Measurement precision
If two co-located cells with different response characteristics are provided, then the measurement precision is improved through referencing, but the device complexity increases
Solution Approach 1:
The device is segmented into multiple identical sealed cells, each containing a sensor element and cap. By providing two or more co-located cells with different response characteristics (e.g., different sensor materials or cap transmissions), reference measurements can be made between cells to improve precision while maintaining a simple replicated structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a cost-effective, protected, and efficient means to focus infrared radiation onto sensitive points, enhancing signal amplification and enabling precise radiation detection and analysis, while minimizing heat loss and handling issues.
Implementation Method 1
a lens is provided over the sensor element, the lens being capable of focusing incident radiation of a given frequency onto a specific point on the sensor
Implementation Method 2
a sensor element formed in a first substrate... each of the first and second sensor elements has a respective cap provided thereabove thereby providing first and second cells
Data Source
AI summary
The invention provides a sensor including a first sensor element formed in a first substrate and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the first sensor element, the at least one optical element being configured to guide incident radiation on the cap to the first sensor element. The sensor also includes a reference sensor element whose output can be used to reference the output of the first sensor element.