Dual Swing Mirror Optical Path for Precise Beam Position and Angle
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Solution Overview
Problem
Existing optical apparatuses for processing workpieces with light lack efficient control over the irradiation position and angle, leading to suboptimal processing results due to limitations in adjusting the reflective surfaces' orientations and positions.
Innovation Solution
The optical apparatus includes a first and second swingable reflective member, integrated with intermediate and objective optical systems, allowing precise control over the irradiation position and angle by adjusting the orientations of the reflective surfaces, enabling flexible positioning and angle manipulation of the light beam on the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single reflective member is used to control light direction, then the device complexity is low, but the control precision over irradiation position and angle is insufficient
Solution Approach 1:
The single reflective member is divided into two separate reflective members (first and second reflective members), each with independent swingable surfaces. This segmentation allows independent control of irradiation angle (via first reflective member) and irradiation position (via second reflective member), achieving precise dual-parameter control without requiring a complex multi-component system.
Solution Approach 2:
Both reflective members are designed with swingable surfaces that can dynamically adjust their orientations. The first reflective member swings to control the angle of incident light, while the second reflective member swings to control the position of irradiation on the workpiece. This dynamic adjustability enables real-time precision control of light delivery parameters.
2Measurement precision
If multiple optical systems are integrated to improve control, then the control precision increases, but the device complexity increases
Solution Approach 1:
The patent combines multiple optical functions (light direction control, position control, and workpiece irradiation) into a single integrated optical apparatus. The first and second reflective members are incorporated within the optical system, allowing coordinated control of both angle and position parameters through a unified structure rather than separate independent systems.
Solution Approach 2:
The optical system is designed to perform multiple functions simultaneously: the first reflective member controls incident angle, the second reflective member controls irradiation position, and the objective optical system delivers focused light to the workpiece. This multi-functionality is achieved through a compact integrated design where each component serves a specific purpose within the overall light delivery pathway.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances control speed and precision, allowing for accurate adjustment of the irradiation position and angle, thereby improving processing outcomes such as forming precise holes or grooves on the workpiece.
Implementation Method 1
a first reflective member (14) having a first reflective surface (15) that is swingable, light from a light source (10) entering the first reflective member (14)
Implementation Method 2
an intermediate optical system which light from the first reflective member (14) enters
Implementation Method 3
a second reflective member (16) having a second reflective surface (17) that is swingable, light from the intermediate optical system entering the second reflective member (16)
Implementation Method 4
an objective optical system configured to condenses light from the second reflective member (16) on a workpiece (W)
Data Source
AI summary
An optical apparatus includes: a first optical system configured to guide light from a first area on a first plane to a second plane, the second plane being a pupil plane of the first optical system relative to the first plane; a second optical system disposed between the second plane and a third plane, the second plane being a pupil plane of the second optical system relative to the third plane; a first reflective member that is disposed on a first optical path at an entrance side of the first optical system and that has a first reflective surface that is swingable; and a second reflective member that is disposed on a second optical path between the first optical system and the second optical system and that has a second reflective surface that is swingable.