Dual Transfer Arms with Overlapping Vertical Ranges
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Solution Overview
Problem
Conventional substrate processing apparatuses have limited throughput due to restricted movement ranges of transfer arms, which can lead to reduced efficiency when one arm is malfunctioning, preventing all processing units from being utilized.
Innovation Solution
The substrate processing apparatus features two transfer arms with overlapping vertical movement ranges, allowing independent vertical movement and rotation, enabling both arms to load/unload substrates into/from all processing units, even if one arm is malfunctioning, and optimizing the assignment of processing units to maintain throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the movement range of the upper transfer arm is limited within the height range of the upper processing units, then the upper transfer arm can perform its function, but when a problem occurs in the upper transfer arm, all of the upper processing units cannot be used, so the throughput is deteriorated
Solution Approach 1:
The patent makes the transfer arms universal by enabling each transfer arm to serve multiple processing units beyond its originally designated range. The upper transfer arm can now serve both upper and lower processing units, while the lower transfer arm can serve both lower and upper processing units. This multi-functionality ensures that if one transfer arm fails, the other can compensate and maintain system throughput.
2Reliability
If the movement range of the lower transfer arm is limited within the height range of the lower processing units, then the lower transfer arm can perform its function, but when a problem occurs in the lower transfer arm, all of the lower processing units cannot be used, so the throughput may be deteriorated
Solution Approach 1:
The lower transfer arm is designed to be universal by enabling it to load/unload substrates into/from both lower processing units and upper processing units. This expands its functional capability beyond the conventional limitation, ensuring that lower processing units remain accessible even if the lower transfer arm experiences problems.
3Device complexity
If transfer arms have limited movement ranges, then the device structure can be simplified, but the complexity of transfer schedules increases when trying to maintain throughput during arm failures
Solution Approach 1:
The patent implements dynamic transfer arm operation where the assignment of processing units to transfer arms is not fixed but can be adjusted based on operational needs and failure conditions. The control device dynamically reassigns processing units between transfer arms to maintain throughput, transforming the system from a static to a dynamic configuration.
Data Source
AI summary
A throughput can be improved. A substrate processing apparatus includes processing units arranged in a vertical direction and configured to process substrates; and a substrate transfer device configured to be moved in the vertical direction and perform loading/unloading of the substrates into/from the processing units. Further, the substrate transfer device comprises a first transfer arm and a second transfer arm which are arranged in the vertical direction and configured to be moved in the vertical direction independently, and movement ranges of the first transfer arm and the second transfer arm in the vertical direction are overlapped with each other.