Dual Transfer Units for High-Throughput Substrate Replacement
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Solution Overview
Problem
Existing substrate processing systems face limitations in performing substrate replacement operations with high degree of freedom and throughput, especially when dealing with multiple modules in arbitrary arrangements.
Innovation Solution
A substrate processing system equipped with a substrate transfer device featuring two or more independently and freely movable and swivelable transfer units, controlled by a planar motor, allowing concurrent parallel movement to facilitate high-throughput substrate replacement between multiple modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a conventional substrate transfer device with single holder and swiveling mechanism is used, then the structure is relatively simple, but the substrate replacement operation lacks degree of freedom and has low throughput when dealing with multiple modules
Solution Approach 1:
The substrate transfer device is divided into multiple independent transfer units (first transfer unit and second transfer unit), each capable of independently holding and transferring substrates. This segmentation allows parallel operations between multiple modules, increasing the degree of freedom in substrate replacement while maintaining manageable complexity through modular design
Solution Approach 2:
The transfer units are designed with both linear movement capability and swiveling capability, allowing dynamic repositioning in multiple directions. This dynamic configuration enables flexible substrate replacement operations between arbitrarily arranged modules, significantly improving adaptability without requiring a completely complex fixed structure
2Productivity
If a conventional substrate transfer device operates sequentially, then the device complexity remains low, but the throughput is limited when performing substrate replacement across multiple modules
Solution Approach 1:
By dividing the transfer device into multiple independent transfer units with separate drive mechanisms, the system enables parallel substrate transfer operations. The first transfer unit and second transfer unit can operate simultaneously to move substrates between different modules, dramatically increasing throughput while the modular control architecture manages complexity
Solution Approach 2:
The parallel operation capability allows continuous substrate replacement operations without idle waiting time. While one transfer unit is moving a substrate, another can simultaneously perform a transfer operation, ensuring continuous productive action across the system and maximizing throughput
3Adaptability or versatility
If modules are arranged in complex configurations, then the system flexibility is improved, but the time required for valve operations and substrate transfer increases
Solution Approach 1:
The transfer units possess dynamic repositioning capability with both linear movement and swiveling functions, allowing them to adapt to complex module arrangements in real-time. This dynamic positioning minimizes travel distances and optimizes transfer paths, reducing the time penalty associated with complex configurations while maintaining flexibility
Solution Approach 2:
The transfer units can be pre-positioned near modules in anticipation of substrate transfer needs. The system prepares transfer units in advance at optimal positions, so when substrate replacement is required between complexly arranged modules, the transfer can begin immediately with minimal valve operation time
Data Source
AI summary
There is provided a substrate processing system comprising: a plurality of modules including a processing chamber in which a substrate is held and processing is performed on the substrate; a transfer chamber to which the plurality of modules are connected; a substrate transfer device provided inside the transfer chamber, for transferring the substrate to the plurality of modules and taking out the substrate from the plurality of modules; and a controller. The substrate transfer device includes a first transfer unit and a second transfer unit, each of which places thereon the substrate and is linearly movable and swivelable independently and freely over a surface of the transfer chamber, and the controller controls the substrate transfer device such that a substrate replacement operation is performed from one module to another module among the plurality of modules by moving the first transfer unit and the second transfer unit concurrently in parallel.