Dual Traversing Mechanism for Batch Substrate Conveyance
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Solution Overview
Problem
Existing batch substrate processing apparatuses face inefficiencies in processing speed and footprint management due to single substrate-conveying-path systems, leading to stagnation and increased complexity.
Innovation Solution
The apparatus incorporates dual traversing mechanisms and an elevation mechanism to enable simultaneous conveyance of processed and unprocessed substrates through separate paths, allowing for continuous processing without waiting, and a simplified structure that reduces the footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single substrate-conveying-path system is used, then the apparatus structure is simpler, but processing speed decreases due to stagnation and path conflicts
Solution Approach 1:
The substrate conveying system is divided into two separate paths: a first substrate-conveying path for conveying substrates to the substrate processing unit, and a second substrate-conveying path for conveying processed substrates away from the processing unit. This segmentation eliminates path conflicts and allows simultaneous bidirectional substrate flow, resolving the stagnation problem while maintaining structural simplicity.
2Adaptability or versatility
If a vertical articulated arm robot with hand exchange system is used, then substrate handling flexibility is improved, but apparatus footprint and complexity increase
Solution Approach 1:
The complex hand exchange system and vertical articulated arm robot are completely removed from the apparatus. Instead, simple conveying mechanisms with separate loading and unloading paths are used, extracting the unnecessary complexity while maintaining substrate handling capability through the dual-path configuration.
Solution Approach 2:
Instead of using a single robot that exchanges hands to handle different substrate states, the invention inverts the approach by using separate conveying paths for different substrate states (processed and unprocessed), eliminating the need for hand exchange mechanisms and reducing apparatus footprint.
3Productivity
If batch organization and disorganization processes are implemented, then substrate processing efficiency is improved, but conveying path complexity increases
Solution Approach 1:
The conveying system is segmented into distinct paths that naturally support batch organization and disorganization processes. The first path handles incoming substrates for batch organization, while the second path handles outgoing substrates for disorganization, simplifying the conveying mechanisms while maintaining processing efficiency.
Data Source
AI summary
A substrate processing apparatus includes a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that laterally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position; a second traversing mechanism that laterally moves a second traverse holding portion along a second traversing path disposed below the first traversing path between the substrate transfer position and the substrate delivery position; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section, the first and second traverse holding portions, and the elevation holding portion each holds a plurality of substrates assuming a vertical posture in a batch manner.