Dual-Waveguide LED-Laser Illumination for Uniform Power Density
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Solution Overview
Problem
Existing illumination systems for inspection and imaging in electronics manufacturing face challenges with non-uniformity, reduced intensity, and space limitations, particularly when using LEDs and lasers, which affect defect detection and yield in semiconductor devices.
Innovation Solution
A combined illumination system using an LED light source and a laser light source, coupled through waveguides and optical fibers, to provide simultaneous or modulated illumination with enhanced uniformity and power density, allowing for greater design flexibility and cooling capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a laser light source is used for illumination, then illumination intensity is improved, but illumination uniformity deteriorates due to speckle pattern
Solution Approach 1:
The patent combines LED and laser light sources in a hybrid illumination system. The LED provides uniform broad-spectrum illumination while the laser provides high intensity illumination at specific wavelengths, achieving both uniformity and intensity simultaneously
Solution Approach 2:
The patent uses different illumination characteristics in different spatial regions - LED illumination provides uniform background lighting while laser illumination provides concentrated high-intensity regions, creating locally optimized illumination quality
2Stability of the object's composition
If an LED light source is used for illumination, then illumination uniformity is improved, but illumination intensity deteriorates
Solution Approach 1:
The patent combines LED and laser light sources in a hybrid illumination system. The LED provides uniform broad-spectrum illumination while the laser provides high intensity illumination at specific wavelengths, achieving both uniformity and intensity simultaneously
Solution Approach 2:
The patent creates a composite illumination system combining two different light source types (LED and laser) with complementary characteristics, where the LED component ensures uniformity and the laser component ensures high intensity
3Adaptability or versatility
If a gas discharge lamp is used for illumination, then broad spectrum emission is improved, but illumination intensity deteriorates
Solution Approach 1:
The patent combines LED and laser light sources where the LED provides broad-spectrum illumination similar to gas discharge lamps but with higher efficiency and intensity, while the laser adds specific wavelength coverage
4Power
If laser light source is used, then power density is improved, but space requirements deteriorate due to cooling needs
Solution Approach 1:
The patent integrates the laser light source and cooling system into a compact nested structure where the cooling channels are embedded within or adjacent to the laser diode assembly, minimizing the overall space footprint while maintaining high power density
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves improved illumination uniformity and power density, enhancing defect detection and yield in semiconductor devices by integrating LED and laser light sources, while overcoming space limitations and enabling higher power illumination.
Implementation Method 1
an LED light source configured to emit light from an input end of the first waveguide and through the output end of the second waveguide to illuminate a workpiece
Implementation Method 2
The first waveguide may have a smaller cross-section than the second waveguide, which forms a ledge at the input end of the second waveguide
Implementation Method 3
a laser light source coupled to an input end of the optical fiber. An output end of the optical fiber may be coupled to the input end of the second waveguide. The laser light source may be configured to emit laser light from the input end of the optical fiber through the output end of the second waveguide to illuminate the workpiece
Implementation Method 4
An output end of the optical fiber may be coupled to the input end of the second waveguide
Data Source
AI summary
The combined illumination system includes a first waveguide and a second waveguide. An output end of the first waveguide is coupled to an input end of the second waveguide. An LED light source is configured to emit light from an input end of the first waveguide and through the output end of the second waveguide to illuminate a workpiece. A laser light source is coupled to an input end of an optical fiber, and an output end of the optical fiber is coupled to the input end of the second waveguide. The laser light source is configured to emit laser light from the input end of the optical fiber through the output end of the second waveguide to illuminate the workpiece.