Dual-Wavelength Optical Path Correction for Chromatic Focus Alignment

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Solution Overview

Problem

Existing optical processing apparatuses face challenges in accurately processing and measuring objects due to chromatic aberrations, particularly axial and lateral chromatic aberrations, which affect the precision of light beam condensation and positioning.

Innovation Solution

The optical processing apparatus incorporates a combining element that combines light beams of different wavelengths, a condensing optical system with positive refractive power, and a correction optical system with negative or positive refractive power, strategically placed to minimize chromatic aberrations and ensure accurate beam alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a condensing optical system with positive refractive power is used to condense light beams of different wavelengths, then the light beams can be focused on the processing target object, but axial chromatic aberration occurs causing different wavelengths to focus at different positions along the optical axis

Engineering Contradiction:
Improvelight beam condensation precisionVSAvoidfocus position accuracy
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

A correction optical system with negative refractive power is introduced as an intermediary component between the light source and the processing target. This correction optical system acts as a mediator that compensates for the axial chromatic aberration caused by the condensing optical system, enabling both measurement and processing light beams of different wavelengths to focus at the same position on the processing target object.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the refractive power parameter of the correction optical system (using negative refractive power) to counterbalance the positive refractive power of the condensing optical system. By carefully selecting the refractive power of the correction optical system, the combined optical system achieves chromatic aberration correction while maintaining effective light condensation.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If light beams of different wavelengths are combined for processing and measurement, then both functions can be performed with a single optical system, but chromatic aberrations affect the accuracy of both processing and measurement

Engineering Contradiction:
Improvedual function capabilityVSAvoidprocessing accuracy
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The correction optical system serves as a mediator that enables the combined optical system to handle multiple wavelengths effectively. It compensates for chromatic aberrations affecting both processing and measurement functions, allowing the system to maintain high precision while performing dual functions with light beams of different wavelengths.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The optical system is designed to perform multiple functions (processing and measurement) using light beams of different wavelengths. The correction optical system ensures that both functions can be executed with high accuracy by correcting chromatic aberrations, making the system universal and adaptable to different operational requirements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If the correction optical system is placed on the first optical path at the entrance side of the combining element, then chromatic aberration can be corrected for the processing light beam, but the optical path length and system complexity increase

Engineering Contradiction:
Improvechromatic aberration correctionVSAvoidoptical system configuration
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The correction optical system is positioned at the entrance side of the combining element, performing chromatic aberration correction in advance before the light beams are combined and processed. This preliminary correction ensures that both measurement and processing light beams are properly focused on the processing target object, improving accuracy while maintaining a relatively simple optical path configuration.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables precise detection and processing of objects by reducing chromatic aberrations, leading to improved accuracy and reliability in optical processing tasks.

Implementation Method 1

a condensing optical system that has a positive refractive power and that condenses each of the first light beam and the second light beam from the combining element on a processing target object

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

a correction optical system that has a negative refractive power, wherein the correction optical system is disposed on the first optical path at an entrance side of the combining element

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS20250147292A1Optical processing apparatus
Publication Date: 2025.05.08 NIKON CORP
  • US20250147292A1 patent drawing
  • US20250147292A1 patent drawing
  • US20250147292A1 patent drawing

AI summary

An optical processing apparatus includes: a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength; a condensing optical system having a positive refractive power and that condenses each of the first and second light beams from the combining element on a processing target object; and a correction optical system having a negative refractive power, the correction optical system is disposed on the first optical path at an entrance side of the combining element, one light beam of the first light beam and the second light beam is a light beam for processing the processing target object, the other light beam of the first light beam and the second light beam is a light beam for measuring the processing target object.