Dual Wavelength Selection for Surface Inspection

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Solution Overview

Problem

Existing optical inspection methods struggle to accurately measure surface properties of objects in a non-contact state, particularly in distinguishing between smooth surfaces and those with micron-sized unevenness.

Innovation Solution

The optical inspection apparatus employs a dual wavelength selection system, where a first wavelength selection portion and a second wavelength selection portion are configured to selectively pass and shield light components of specific wavelengths, enhancing the accuracy of surface inspection by differentiating between standard and uneven surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional optical inspection methods are used, then non-contact surface measurement is achieved, but measurement precision is insufficient to distinguish between smooth surfaces and those with micron-sized unevenness

Engineering Contradiction:
Improvesurface property measurement precisionVSAvoidsurface defect detection reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent changes the wavelength parameter of incident light to achieve different inspection results. By using a first wavelength selection portion to pass light of a first wavelength and a second wavelength selection portion to pass light of a second wavelength, the system exploits wavelength-dependent surface scattering characteristics to distinguish between smooth and uneven surfaces, thereby improving measurement precision and defect detection reliability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent segments the wavelength selection function into two separate portions: a first wavelength selection portion for selecting light of a first wavelength and a second wavelength selection portion for selecting light of a second wavelength. This segmentation allows independent optimization of each wavelength path and enables comparative analysis of surface properties at different wavelengths, enhancing the ability to detect micron-sized unevenness

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If single wavelength light is used for inspection, then device complexity is reduced, but the ability to distinguish between standard and uneven surfaces is insufficient

Engineering Contradiction:
Improvesurface unevenness detection precisionVSAvoidwavelength selection system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The wavelength selection system is segmented into two independent portions, each responsible for selecting a specific wavelength range. This segmentation enables the system to maintain relatively simple individual components while achieving enhanced surface unevenness detection capability through multi-wavelength comparison

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each wavelength selection portion is optimized for its specific wavelength range, with the first wavelength selection portion tailored for the first wavelength and the second for the second wavelength. This local optimization allows each component to be simpler and more efficient while the combined system achieves superior overall performance in distinguishing surface types

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly increases the accuracy of optical inspection by effectively distinguishing between smooth and uneven surfaces, improving the signal-to-noise ratio and enabling clearer identification of surface defects.

Implementation Method 1

a first wavelength selection portion configured to selectively pass a plurality of light components of predetermined wavelengths

Methodology Applied
Scientific EffectWavelength selection: Filter (optical)

Implementation Method 2

a second wavelength selection portion configured to pass the plurality of light components of the predetermined wavelengths complementarily to the first wavelength selection portion

Methodology Applied
Scientific EffectWavelength selection: Filter (optical)

Implementation Method 3

an image sensor configured to capture a subject by light from the subject

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS12276616B2Optical inspection apparatus, processing device, optical inspection method, and non-transitory storage medium storing optical inspection program
Publication Date: 2025.04.15 KK TOSHIBA
  • US12276616B2 patent drawing
  • US12276616B2 patent drawing
  • US12276616B2 patent drawing

AI summary

According to an embodiment, an optical inspection apparatus includes an imaging portion, a first wavelength selection portion, an illumination portion, and a second wavelength selection portion. The imaging portion includes an image sensor configured to capture a subject by light from the subject. The first wavelength selection portion is provided on an optical axis of the imaging portion and is configured to selectively pass a plurality of light components of predetermined wavelengths. The illumination portion is configured to illuminate the subject. The second wavelength selection portion is provided on an optical axis of the illumination portion and is configured to pass the plurality of light components of the predetermined wavelengths complementarily to the first wavelength selection portion.