Dual-Zone Hot-Zone Heater for Stable Single Crystal Pulling
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Solution Overview
Problem
The existing single crystal pulling apparatus heaters have a small heating area, leading to uneven heating, high power consumption, slow heating, and instability of the temperature field, which affects the quality and cost of crystal ingots.
Innovation Solution
A heater system comprising a side-main heater and an auxiliary heater, where the auxiliary heater is a cylindrical structure with an electromagnetic induction coil, providing rapid heating and stable temperature control, and an insulating protective cover to enhance the side-main heater's performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a resistance heater is used, then the structure is simple, but the heating speed is slow and the time cost is high
Solution Approach 1:
The heater is divided into two independent heating zones: a side-main heater for the body growth stage and a bottom heater for the melting stage. Each heater can be independently controlled and optimized, allowing the bottom heater to provide rapid initial heating while the side-main heater maintains temperature during growth, thereby reducing total heating time while keeping each individual heater structurally simple
Solution Approach 2:
The patent changes the heating parameters by introducing different heater types (resistance heater for side-main, electromagnetic induction heater for bottom) with different heating characteristics. The bottom heater uses electromagnetic induction to achieve rapid heating, while the side-main heater uses resistance heating for stable temperature maintenance, optimizing the time-cost without overcomplicating either heater's structure
2Area of stationary object
If the heating area of the side-main heater is small, then the heater structure is compact, but the heating is uneven and power consumption increases
Solution Approach 1:
The heating system applies local quality by providing different heating characteristics in different spatial zones: the bottom heater provides intense localized heating for melting, while the side-main heater provides distributed heating along the crucible wall for uniform temperature distribution during growth. This localized heating approach improves heating uniformity without requiring an overall increase in heater size
Solution Approach 2:
The heating function is segmented into two independent heaters with different heating areas and purposes. The bottom heater handles the melting stage with concentrated heating, while the side-main heater handles the growth stage with distributed heating. This segmentation allows each heater to be optimally sized for its specific function, improving overall heating efficiency without increasing total power consumption
3Device complexity
If a single heater is used, then the device structure is simple, but the temperature field stability is poor
Solution Approach 1:
The single heater is segmented into two independent heaters (side-main heater and bottom heater) that can be independently controlled. This allows separate optimization of temperature fields for different stages: the bottom heater maintains stable temperature during melting while the side-main heater provides stable temperature during growth, achieving overall temperature field stability without excessive device complexity
Solution Approach 2:
The insulating protective cover acts as an intermediary element that stabilizes the temperature field by reducing heat loss and isolating the heating zones. This intermediate component helps maintain temperature stability without requiring complex control systems or additional heating elements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves rapid and stable heating, reduces power consumption, extends heater lifespan, and ensures defect-free crystal ingot growth, improving yield and quality while being energy-efficient.
Implementation Method 1
an electromagnetic induction coil; wherein the electromagnetic induction coil is accommodated in the protective casing
Implementation Method 2
the side-main heater is usually a resistance heater
Data Source
AI summary
The present disclosure discloses a heater in a Hot-Zone of a single crystal pulling apparatus and a single crystal pulling apparatus. The heater in the Hot-Zone of the single crystal pulling apparatus includes a side-main heater and an auxiliary heater. Each of the side-main heater and the auxiliary heater is a cylindrical structure with openings at two ends thereof. Each of the side-main heater and the auxiliary heater includes a top open end and a bottom open end. The auxiliary heater is sleeved around the side-main heater, and the top open end of the auxiliary heater extends out of the top open end of the side-main heater.