Dual-Zone Raw Material Feeding Device for Film Formation
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Solution Overview
Problem
In film formation systems, solid raw materials in powder form, especially those with small particle diameters, are prone to being blown away during heating or carrier gas supply, leading to particle incorporation into films and reduced quality, such as in semiconductor production.
Innovation Solution
A raw material feeding device with a container and dual heating units, where one side is heated higher than the other to sublimate solid raw materials, ensuring gaseous raw material formation while suppressing particle generation by alternately setting temperatures to solidify fine particles and grow larger ones, thereby stabilizing the supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If solid raw materials in powder form are heated or carrier gas is used to supply them, then the raw material can be supplied to the film formation system, but small particle diameter materials are blown away and incorporated into the film, deteriorating film quality
Solution Approach 1:
The container is divided into a first region and a second region with different temperature zones. The first heating unit heats the first region to a higher temperature to sublimate fine particles, while the second heating unit maintains the second region at a lower temperature to condense and collect these particles, preventing them from being blown into the film formation system.
Solution Approach 2:
Different regions of the container are assigned different temperature characteristics. The first region (where raw material is placed) is maintained at a higher temperature to promote sublimation, while the second region is maintained at a lower temperature to promote condensation and particle collection, creating localized quality differences that solve the particle blow-away problem.
2Temperature
If convection is caused by heating to sublimate solid raw material, then the raw material can be converted to gaseous form, but fine particles are blown away by the convection current
Solution Approach 1:
A temperature gradient is introduced as an intermediary mechanism between the heating process and particle transport. The first region provides heat for sublimation while the second region provides a cooler zone that acts as a condensation trap, intercepting fine particles before they can be carried away by convection currents into the film formation system.
Solution Approach 2:
The invention utilizes phase transitions (sublimation and condensation) at different locations within the container. Fine particles that sublime in the first region are transported by convection but then condense in the second region due to the lower temperature, effectively removing them from the gas phase before they can contaminate the film formation process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively suppresses particle generation, ensuring a stable supply of pure gaseous raw materials to film formation systems, improving film quality and reducing yield losses.
Implementation Method 1
a first temperature control unit for conducting a first process of controlling the first and the second heating unit to make the temperature of the first side higher than that of the second side to thereby sublimate the solid raw material disposed at the first side
Data Source
AI summary
A raw material feeding device for feeding a gaseous raw material formed by sublimating a solid raw material to a film formation system includes a raw material container for holding the solid raw material therein, a first heating unit placed at a first side of the container, a second heating unit placed at a second side thereof, the first temperature control unit for conducting a first process of controlling the first and the second heating unit to make the temperature of the first side higher than that of the second side to thereby sublimate the solid raw material disposed at the first side, and the second temperature control unit for conducting a second process of controlling the first and the second heating unit to make the temperature of the second side higher than that of the first side to thereby sublimate the solid raw material disposed at the second side.