Integrated Air Duct Flow Partitioning for Cleanroom Humidity Control
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Solution Overview
Problem
Conventional air conditioners used in cleanrooms, such as those for semiconductor manufacturing, are large and inefficient due to independent main-flow and sub-flow path units, and require precise temperature and humidity control, which is challenging especially in photolithography processes where photoresist properties are sensitive to both temperature and humidity.
Innovation Solution
An air conditioner design with a duct having an upstream flow path unit partitioned into main-flow and sub-flow paths, where a cooling unit is positioned in the main-flow path and a heating unit in the downstream flow path, and a flowrate adjusting member on the partition plate adjusts the opening area of the sub-flow path to control air flowrates, allowing for energy savings without increasing the unit's size, and includes a humidifier with a turbulence-reducing design for improved humidity control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If independent main-flow and sub-flow path units are used with separate cooling and heating means, then temperature control capability is improved, but device size increases
Solution Approach 1:
The patent combines the main-flow path unit and sub-flow path unit into a single integrated duct structure, merging previously separate cooling and heating means into shared thermal processing components. This integration maintains the functional independence of different air flow paths while reducing overall device size by eliminating redundant structural elements.
Solution Approach 2:
The cooling means and heating means are designed to serve multiple functions: they can process air in both main-flow and sub-flow paths, and can operate independently or in combination depending on environmental conditions. This multi-functionality allows a single set of thermal processing components to replace what would traditionally require separate dedicated units for each flow path.
2Loss of energy
If a flowrate adjusting member is added to control air flow distribution, then energy efficiency is improved, but device complexity increases
Solution Approach 1:
The flowrate adjusting member is designed as a movable component that can dynamically change the opening area of the sub-flow path according to real-time environmental conditions. This dynamic adjustment capability allows the system to optimize energy efficiency by directing appropriate proportions of air through cooling or heating paths, while the simple mechanical design keeps added complexity minimal.
Solution Approach 2:
The flowrate adjusting member acts as an intermediary element between the air source and the thermal processing units, mediating the distribution of air flow without requiring complex control systems. By positioning this single adjusting component in the sub-flow path, the system achieves efficient flow distribution with minimal additional parts.
3Manufacturing precision
If humidity control is added to the air conditioning system, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The humidifying means is integrated into the existing duct structure and thermal processing system, combining humidity control functionality with the air flow distribution and thermal processing pathways. This integration allows humidity control to be achieved without adding completely separate handling systems, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design allows for flexible adjustment of air flowrates and precise humidity control, reducing energy consumption and improving productivity by simplifying the installation structure and reducing the overall size of the air conditioner, while maintaining precise temperature and humidity control.
Implementation Method 1
a cooling unit that is positioned in the upstream flow path unit of the duct and cools the air whose temperature is to be controlled
Implementation Method 2
a heating unit that is positioned in the downstream flow path unit of the duct and heats the air whose temperature is to be controlled
Data Source
AI summary
An air conditioner includes: a duct including an upstream flow path unit having an inlet through which air is taken in, and a downstream flow path unit provided with an outlet through which the air is discharged; a cooling unit positioned in the upstream flow path unit of the duct and cools the air; and a heating unit that is positioned in the downstream flow path unit of the duct and heats the air. The upstream flow path unit has a partition plate that partitions an inside space thereof into a main-flow flow path and a sub-flow flow path. The cooing unit is positioned in the main-flow flow path. The upstream flow path unit is provided with a flowrate adjusting member that covers at least a part of the sub-flow flow path so as to adjust an opening area of the sub-flow flow path.