Dummy Contact Thermal Conduction for MRAM Crystallinity

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Solution Overview

Problem

Current magnetic storage devices face inefficiencies in heat transfer during the manufacturing process, particularly in stabilizing the magnetization of magnetoresistive effect elements, which affects the crystallinity and performance of the magnetic storage device.

Innovation Solution

Incorporating a dummy contact with high thermal conductivity that extends from the substrate surface to the magnetoresistive effect element, along with optimizing the thermal conductivity ratio between the magnetoresistive effect element and the insulating layer, to enhance heat transfer and stabilize magnetization during the manufacturing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If heat transfer during manufacturing is insufficient, then magnetization stability is poor, but adding thermal conduction paths increases device complexity

Engineering Contradiction:
Improvemagnetization stabilityVSAvoiddevice complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

A dummy contact structure is introduced as an intermediary thermal conduction path between the heating substrate and the magnetoresistive effect element. This dummy contact serves solely as a heat transfer mediator during manufacturing processes, enabling efficient thermal coupling without creating electrical connections or adding functional complexity to the operational device.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The thermal conduction function is extracted from the functional components of the device and implemented through a separate dummy contact structure. This separation allows the heating substrate to transfer heat efficiently to the magnetoresistive effect element without requiring the device's operational components to承担 thermal management functions, thus avoiding increased device complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

2Loss of energy

If thermal conductivity of the magnetoresistive effect element is increased, then heat transfer efficiency improves, but manufacturing precision requirements increase

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidmanufacturing precision
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

The dummy contact structure provides localized high thermal conductivity specifically at the interface between the heating substrate and the magnetoresistive effect element. By concentrating thermal enhancement at this critical location rather than requiring uniform high thermal conductivity throughout the entire magnetoresistive effect element, the manufacturing precision requirements are significantly reduced.

Inventive Principle:
Principle #3Local quality

3Reliability

If a dummy contact is added to improve heat transfer, then crystallinity improves, but the device structure becomes more complex

Engineering Contradiction:
ImprovecrystallinityVSAvoiddevice structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The dummy contact acts as a temporary intermediary structure during manufacturing that facilitates heat transfer to improve crystallinity. This structure is non-functional during device operation and can be removed or left as an inert element, thus improving reliability without permanently increasing operational device complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The dummy contact enables preliminary heat treatment actions during manufacturing to achieve optimal crystallinity before the device is fully assembled and operational. By providing enhanced thermal conduction during these preliminary manufacturing stages, the crystallinity of the magnetoresistive effect element is improved without requiring structural modifications to the final device.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for efficient heat transfer to the magnetoresistive effect element, improving its crystallinity and performance, and enables more precise control over the resistance states for data storage.

Implementation Method 1

Incorporating a dummy contact with high thermal conductivity that extends from the substrate surface to the magnetoresistive effect element, along with optimizing the thermal conductivity ratio between the magnetoresistive effect element and the insulating layer, to enhance heat transfer

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

there is known a magnetic storage device (MRAM: Magnetoresistive Random Access Memory) which employs a magnetoresistive effect element as a memory element

Methodology Applied
Scientific EffectMagnetoresistive effect: Magnetoresistance

Data Source

PatentUS10199568B2Magnetic storage device and manufacturing method of magnetic storage device
Publication Date: 2019.02.05 KIOXIA CORP
  • US10199568B2 patent drawing
  • US10199568B2 patent drawing
  • US10199568B2 patent drawing

AI summary

According to one embodiment, a magnetic storage device includes a substrate, a dummy contact disposed on a top surface of the substrate, extending linearly in a direction substantially perpendicular to the top surface of the substrate, and floating electrically, and a magnetoresistive effect element included in a layer and insulated from the dummy contact, wherein the layer is disposed on the top surface of the dummy contact.