Dummy Data Verification for Substrate Abnormality Detection
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Solution Overview
Problem
In the determination of abnormalities in substrate processing apparatuses, the need to adjust reference data when processing recipes or apparatus components change leads to complications in ensuring proper abnormality detection, particularly due to the complexity of verifying the state of the apparatus and the data processing system.
Innovation Solution
A propriety determination device and method that utilize a dummy information generator to provide dummy data to an information analysis device, allowing for the determination of whether the detection of abnormalities is proper by assessing if the invariant relationships set in the device are adapted to the apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If reference data is adjusted when processing recipes or apparatus components change, then abnormality detection accuracy is improved, but verification complexity increases
Solution Approach 1:
The patent creates a virtual copy of the substrate processing apparatus through a dummy apparatus model that replicates the invariant relationships of the actual apparatus. This virtual model allows verification of reference data propriety without physically checking the actual apparatus state, thereby reducing verification complexity while maintaining detection accuracy
Solution Approach 2:
The patent introduces a propriety determination device as an intermediary between the information analysis device and the substrate processing apparatus. This intermediary automatically verifies whether reference data is appropriate by using the dummy apparatus model, eliminating the need for manual verification of apparatus state and data processing system settings
2Measurement precision
If manual checking of apparatus state and data processing system settings is performed, then determination propriety is improved, but operation time increases
Solution Approach 1:
The propriety determination device performs self-verification by automatically comparing the invariant relationships from the dummy apparatus model with the reference data used by the information analysis device. This automated self-checking process eliminates manual verification work and significantly reduces the time required to determine whether abnormality detection is proper
Solution Approach 2:
The patent pre-establishes the dummy apparatus model with invariant relationships before verification is needed. This preliminary preparation allows the propriety determination device to quickly assess whether reference data is appropriate without time-consuming manual checks of apparatus state and system settings
Data Source
AI summary
A propriety determination device includes a dummy information generator that generates dummy information by replacing at least part of the plurality of processing information pieces collected from the substrate processing apparatus with a dummy data piece and provides the dummy information to the information analysis device, and a determiner that determines whether a detecting operation of the information analysis device is proper by determining whether the invariant relationships set in the information analysis device are adapted to the substrate processing apparatus based on whether, in a case in which the dummy information is provided to the information analysis device by the dummy information generator, an abnormality in the substrate processing apparatus has been detected by the information analysis device.