Dummy Gate Tap Cell Layout for Substrate Connection
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Solution Overview
Problem
In semiconductor devices, connecting a dummy gate and a substrate without increasing the circuit area is challenging due to the need for new wiring and connections.
Innovation Solution
The semiconductor device design includes extending a dummy gate across fins to a tap cell, allowing electrical connection to the substrate without additional wiring, thus maintaining circuit area efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If new wiring and connections are provided to electrically connect a dummy gate and a substrate, then the dummy gate can be electrically connected to the substrate, but the circuit area increases
Solution Approach 1:
The dummy gate structure is merged with the tap cell structure. The dummy gate is formed to extend over the tap cell region, and the tap cell's substrate connection is shared with the dummy gate, eliminating the need for separate wiring and connections for the dummy gate to the substrate.
Solution Approach 2:
The tap cell structure serves dual purposes: it provides substrate connection for the tap cell itself and simultaneously provides substrate connection for the dummy gate. This multi-functionality reduces the overall circuit area by eliminating redundant wiring and connection structures.
2Reliability
If additional wiring and connections are added for dummy gate substrate connection, then electrical connection is achieved, but device complexity increases
Solution Approach 1:
The dummy gate structure is merged with the tap cell structure. The dummy gate is formed to extend over the tap cell region, and the tap cell's substrate connection is shared with the dummy gate, eliminating the need for separate wiring and connections for the dummy gate to the substrate.
Solution Approach 2:
The tap cell structure provides its own substrate connection and simultaneously serves to connect the dummy gate to the substrate. The existing tap cell infrastructure is utilized to serve the dummy gate's connection needs without requiring additional dedicated wiring or connection structures.
Data Source
AI summary
A semiconductor device includes a first fin and a second fin, the first fin and the second fin being formed on a substrate and extending in a first direction in a plan view; a first circuit and a second circuit, the first circuit and the second circuit being formed in the first fin; a first tap cell formed in the second fin; and a first dummy gate disposed between the first circuit and the second circuit, disposed on the first fin and the second fin, and extending in a second direction different from the first direction in the plan view. A region located below the first dummy gate in the first fin is electrically connected to the first dummy gate via the second fin forming the first tap cell.