Dummy Substrate Replacement Notification in Substrate Processing
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Solution Overview
Problem
Existing substrate processing apparatuses lack the ability to determine the replacement timing of dummy substrates with an external control device, leading to potential inconsistencies in film formation and inefficiencies in dummy substrate management.
Innovation Solution
A substrate processing apparatus that communicates with an external control device, featuring a controller to determine the number of unusable dummy substrates and notify the external device of replacement needs, prohibiting unloading when unusable substrates exceed a set value, and allowing replacement when instructed by the external device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If dummy substrates are repeatedly used in film formation processings, then productivity is improved, but film formation uniformity deteriorates due to cumulative film thickness exceeding specifications
Solution Approach 1:
The system proactively monitors the usage count of dummy substrates and determines replacement timing before the cumulative film thickness actually exceeds the specification. The controller compares the number of times each dummy substrate has been used against a predetermined replacement threshold, enabling preventive replacement that maintains film formation uniformity while maximizing productivity.
2Device complexity
If dummy substrate replacement is performed manually without external control integration, then device complexity is reduced, but loss of information occurs regarding replacement timing and management status
Solution Approach 1:
The controller continuously monitors and tracks the number of times each dummy substrate is used in film formation processings. This feedback mechanism provides real-time information about dummy substrate usage status to the external control device, enabling informed decision-making about replacement timing without requiring complex manual tracking systems.
Solution Approach 2:
The controller acts as an intermediary between the film formation processing system and the external control device. It manages the dummy substrate usage information and communicates replacement timing decisions to the external device, simplifying the overall system architecture while maintaining comprehensive information management.
3Ease of operation
If dummy substrate usage is not monitored, then ease of operation is improved, but reliability deteriorates due to potential film formation defects
Solution Approach 1:
The system automatically monitors and manages dummy substrate usage without requiring manual intervention. The controller autonomously tracks the number of times each dummy substrate is used, determines when replacement is needed, and communicates this information to the external control device, maintaining both ease of operation and reliability.
Data Source
AI summary
A substrate processing apparatus disclosed herein is capable of communicating with an external control apparatus. The substrate processing apparatus includes: a container placing portion configured to place thereon a transport container accommodating a product substrate therein; a dummy substrate accommodating unit configured to accommodate dummy substrates therein; a transport chamber provided with a transport mechanism configured to transport the product substrate and the dummy substrates; a processing chamber configured to process the product substrate and the dummy substrates transported thereto by the transport mechanism; and a controller configured to determine whether or not a number of unusable dummy substrates among the dummy substrates accommodated in the dummy substrate accommodating unit is equal to or greater than a set value, and notify the external control device of a warning when it is determined that the number of dummy substrates is equal to or greater than the set value.