Dummy Wafer Storage Cassette High-Density Slot Design
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing storage solutions for dummy wafers in batch wafer processing apparatuses are inefficient, as they require multiple standardized cassettes with limited slots, leading to reduced storage capacity for production wafers due to the need for extra space and increased costs to accommodate a high number of dummy wafers.
Innovation Solution
A dummy wafer storage cassette with more than 30 slots, designed to fit within the same physical dimensions as standard cassettes, allowing for increased storage of dummy wafers without expanding the apparatus, thereby reducing the need for multiple cassettes and optimizing space for production wafers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If standardized wafer cassettes with 25 slots are used to store dummy wafers, then the storage device can accommodate production wafer cassettes, but the storage capacity for dummy wafers is insufficient and reduces available space for production wafers
Solution Approach 1:
The invention segments the storage function by creating a specialized dummy wafer storage cassette distinct from standardized production wafer cassettes. This dedicated cassette is configured specifically for dummy wafers with a structure optimized for their storage, separating the storage needs of dummy and production wafers to resolve the space conflict.
Solution Approach 2:
The dummy wafer storage cassette utilizes vertical space more efficiently by arranging dummy wafers in a stacked configuration within the cassette. This dimensional optimization allows storing more dummy wafers (at least 30) within the same footprint area, freeing up horizontal space for production wafer cassettes.
2Quantity of substance
If the number of cassette receiving sites in the storage device is increased to accommodate more dummy wafer cassettes, then the storage capacity for dummy wafers is improved, but the apparatus requires extra space and becomes more costly
Solution Approach 1:
The invention merges the storage function for dummy wafers into the existing storage device architecture by utilizing one of the available cassette receiving sites. Instead of adding new receiving sites, the specialized dummy wafer cassette consolidates dummy wafer storage capacity within the current apparatus volume, avoiding expansion requirements.
Solution Approach 2:
The dummy wafer storage cassette changes the storage parameter by increasing the number of wafer slots per cassette from the standard 25 to at least 30 slots. This parameter optimization allows more dummy wafers to be stored in each cassette unit, reducing the total number of cassettes and receiving sites needed.
3Device complexity
If standardized wafer cassettes are used for dummy wafer storage, then the storage device design remains simple, but multiple cassettes are needed which reduces storage capacity for production wafers
Solution Approach 1:
The dummy wafer storage cassette maintains compatibility with the universal cassette receiving site interface, allowing it to be handled by the same wafer handler and stored in the same storage device as production wafer cassettes. This universal interface design preserves system simplicity while achieving enhanced dummy wafer storage capacity.
Data Source
AI summary
A dummy wafer storage cassette for storing dummy wafers. The dummy wafer storage cassette may have more than 30 wafer slots for accommodating dummy wafers. The dummy wafer cassette may have substantially the same outer dimensions as a standardized wafer cassette with 25 wafer slots and a pitch of the wafer slots of the dummy wafer storage cassette may be smaller than a pitch between the wafer slots in the standardized wafer cassette.