Dust Oxide Stabilization in Single Crystal Growth Exit Pipes

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Solution Overview

Problem

Cyclone dust collecting devices used in single crystal growth systems face issues with dust deposition on pipe surfaces, requiring manual labor and posing potential hazards during dust removal.

Innovation Solution

A method involving the use of clean dry air and inert gases to stabilize dust as dust oxide, which is then collected using a cyclone filter and transported by a rotary pump, reducing labor and hazards by preventing deposition and facilitating automated collection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a cyclone dust collecting device is used to collect dust by centrifugal force, then the number of required filters is reduced, but dust is deposited on the inner surface of the pipe requiring manual labor and posing potential hazards

Engineering Contradiction:
Improvenumber of filtersVSAvoidmanual labor for dust removal
Core Design Contradiction:
Device complexityVSEase of operation

Solution Approach 1:

The patent introduces a gas flow intermediary substance to transport dust particles through the pipe system. This gas flow acts as a mediator that prevents dust deposition on pipe surfaces while carrying dust to the collection device, eliminating the need for manual dust removal and maintaining low system complexity

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent uses pneumatic principles by introducing a gas flow into the pipe to create a fluidized bed effect that prevents dust deposition. The gas flow generates upward force on dust particles, keeping them suspended and transported to the collection device without manual intervention, thus resolving the contradiction between reduced filter complexity and ease of operation

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Object-generated harmful factors

If manual labor is used to remove deposited dust, then dust can be removed from the pipe, but potential hazards occur during dust removal

Engineering Contradiction:
Improvedust depositionVSAvoidpotential hazards during dust removal
Core Design Contradiction:
Object-generated harmful factorsVSObject-affected harmful factors

Solution Approach 1:

The system performs self-cleaning by using gas flow to automatically transport dust particles from the pipe interior to the collection device. This self-service mechanism eliminates the need for manual dust removal operations, thereby removing the source of potential hazards associated with manual dust handling while continuously preventing dust deposition

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent applies preliminary action by continuously introducing gas flow into the pipe to prevent dust deposition before it becomes a problem. This proactive approach keeps dust particles suspended and transported to the collection device, eliminating the need for subsequent dust removal operations and associated hazards

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method effectively stabilizes dust in the exit pipe, prevents deposition on inner surfaces, reduces manual labor, and minimizes hazards during dust removal by using inert gases to direct dust oxide to a collection device.

Implementation Method 1

the oxygen reacting with the unstable dust for forming dust oxide so as to stabilize the dust in the exit pipe

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 2

A cyclone dust collecting device is a device for applying to collect dust or particles in gas by centrifugal force

Methodology Applied
Scientific EffectCentrifugal separation: Centrifugal Separation

Implementation Method 3

providing a rotary pump to transport residues of the dust oxide backward

Methodology Applied
Scientific EffectMechanical transport: Pump

Data Source

PatentUS12076677B2Method for collecting dust from single crystal growth system
Publication Date: 2024.09.03 GLOBALWAFERS CO LTD
  • US12076677B2 patent drawing

AI summary

A method for collecting dust from a single crystal growth system includes providing dry air and oxygen into an exit pipe connecting to the single crystal growth system, blowing a first inert gas into the exit pipe to compel the dust oxide toward a dust collecting device, collecting the dust oxide by the dust collecting device; and providing a rotary pump to transport residues of the dust oxide backward. The oxygen reacts with the unstable dust for forming dust oxide. The exit pipe is used to exhaust unstable dust from the single crystal growth system.