Dual-Range Prism Control for DUV Laser Bandwidth Tuning
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Solution Overview
Problem
Existing spectral feature control apparatuses in semiconductor lithography are limited in their ability to adjust the bandwidth of deep ultraviolet light beams, restricting the range of achievable bandwidths and leading to edge placement errors in patterned features on substrates.
Innovation Solution
A spectral feature control apparatus with a second prism divided into two portions, each designed for distinct bandwidth ranges, allows for wider bandwidth adjustments through mechanical movement and rotation of prisms, enabling precise control of optical magnification and wavelength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single prism is used for bandwidth control, then the device structure is simple, but the bandwidth adjustment range is limited
Solution Approach 1:
The second prism is divided into multiple portions (first portion and second portion), each with different geometries optimized for specific bandwidth ranges. This segmentation allows the apparatus to achieve a broader bandwidth adjustment range by selecting different portions, while each individual portion maintains a relatively simple structure.
Solution Approach 2:
The apparatus employs an activation mechanism that can dynamically position different portions of the second prism into the optical path based on the desired bandwidth range. This dynamic reconfiguration enables flexible bandwidth control without requiring a completely different prism structure for each range.
2Adaptability or versatility
If the optical magnification is adjusted to extend bandwidth range, then the bandwidth control flexibility is improved, but the edge placement precision deteriorates
Solution Approach 1:
Different portions of the second prism are designed with specific geometries optimized for particular bandwidth ranges. The first portion is optimized for higher bandwidth ranges (10x-19x magnification) while the second portion is optimized for lower bandwidth ranges (20x-50x magnification). This local optimization ensures that each portion maintains high edge placement precision within its designated bandwidth range.
Solution Approach 2:
The activation mechanism dynamically selects the appropriate prism portion based on the required bandwidth range, ensuring that the optimal geometry is always used for the current operating conditions. This dynamic selection prevents the degradation of edge placement precision that would occur if a single fixed geometry were used for all bandwidth ranges.
3Adaptability or versatility
If multiple prisms with different geometries are used, then the bandwidth range coverage is improved, but the device complexity increases
Solution Approach 1:
Multiple prism portions with different geometries are merged into a single integrated second prism structure. This consolidation allows the apparatus to achieve broad bandwidth range coverage (10x-50x magnification) while avoiding the complexity of managing entirely separate prism components. The activation mechanism simply repositions portions within the same structural assembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables a broader range of bandwidth adjustments, reducing edge placement errors and improving the precision of patterned features on substrates, thereby enhancing the quality and yield of semiconductor fabrication.
Implementation Method 1
a spectral feature selection module including a plurality of prisms arranged in an optical plane and configured to receive and pass an incoming light beam along the optical plane
Data Source
AI summary
A deep ultraviolet laser system includes a line narrowing module including a plurality of prisms such that an incoming laser beam from a laser first interacts with a first prism, then interacts with a second prism after the first prism. The second prism includes two different portions including a first portion designed to work with and enable higher bandwidths of the incoming laser beam and a second portion designed to work with and enable lower bandwidths of the incoming laser beam. The second prism is movable between a first position in which the laser beam interacts with the first portion and a second position in which the laser beam interacts with the first portion. The second prism is movable by translation using an activation mechanism controlled by a controller to vary a target bandwidth of the laser beam.