Dynamic Binary Spatial Filter for Inspection Systems
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Solution Overview
Problem
Current aerial inspection systems face delays and increased costs due to the lengthy process of designing and replacing static spatial filters, which are necessary for simulating various exposure conditions in production environments, leading to inefficiencies in defect identification and production throughput.
Innovation Solution
A method and system for on-demand design and implementation of binary spatial filters, using a pattern generation module to process intensity data and create filters that emulate desired exposure conditions, allowing for dynamic filtering and reducing the need for frequent mask changes in the optical path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If static spatial filters are used to simulate exposure conditions in aerial inspection systems, then the ability to emulate desired exposure conditions is achieved, but the design and replacement process becomes lengthy and costly
Solution Approach 1:
The patent applies the dynamics principle by transitioning from static spatial filters to a dynamic spatial light modulator that can be reconfigured in real-time. The SLM allows for on-demand generation of different spatial filter patterns corresponding to various exposure conditions, eliminating the need for physical mask replacement and reducing design-modification-replacement cycles to near-zero time.
Solution Approach 2:
The patent employs the copying principle by creating digital copies of desired spatial filter patterns that can be rapidly generated and implemented through software control of the SLM. Instead of physically manufacturing and replacing masks, the system generates virtual representations of the required filter patterns, enabling rapid adaptation to different inspection scenarios.
2Adaptability or versatility
If static spatial filters are used for different exposure conditions, then exposure condition simulation is possible, but production throughput is reduced due to frequent mask changes
Solution Approach 1:
The system uses a dynamic spatial light modulator that can switch between different spatial filter patterns instantaneously based on the required exposure condition. This real-time reconfigurability allows the inspection system to adapt to varying production requirements without interrupting the inspection flow for mask changes, thereby maintaining high throughput while preserving exposure condition simulation capabilities.
Solution Approach 2:
The patent ensures continuity of useful action by enabling the spatial light modulator to operate continuously with real-time pattern changes. The system can seamlessly transition between different inspection scenarios without interrupting the inspection process, maintaining continuous productive operation while adapting to different exposure condition requirements.
3Adaptability or versatility
If multiple static spatial filters are maintained for different exposure conditions, then coverage of various inspection scenarios is improved, but device complexity and costs increase
Solution Approach 1:
The patent applies the universality principle by using a single spatial light modulator that can perform the functions of multiple static spatial filters. The SLM is capable of generating any required spatial filter pattern by programming the appropriate pixel configuration, making one device serve multiple inspection scenarios rather than requiring separate dedicated filters for each application.
Solution Approach 2:
The system utilizes parameter changes by dynamically adjusting the transmission characteristics of individual pixels in the spatial light modulator to match the required spatial filter properties. By changing the optical parameters (transmission, phase) of the SLM elements, the system can emulate various exposure conditions without physically changing the filter hardware, thereby reducing device complexity.
Data Source
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AI summary
Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present Methods and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.