Dynamic Cycle Time Adjustment for Semiconductor Substrate Transfer
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses face inefficiencies in setting optimal cycle times for transfer mechanisms, leading to suboptimal throughput and increased memory requirements due to inconsistent processing times across different unit blocks in semiconductor wafer photolithography processes.
Innovation Solution
A substrate processing apparatus with a memory system that stores substrate transfer history to dynamically update cycle times for each unit block, allowing for the creation of a transfer schedule that balances processing efficiency and memory usage by calculating a standard cycle time based on frequently used transfer recipes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If cycle times are set uniformly for all unit blocks, then device operation is simplified, but throughput is reduced due to waiting times in faster unit blocks
Solution Approach 1:
The patent implements dynamic cycle time adjustment where each unit block operates with its own optimized cycle time based on actual processing requirements. The cycle time setting part configures different cycle times for different unit blocks, allowing faster blocks to operate faster and slower blocks to operate at their optimal speed, thereby eliminating waiting times and maximizing overall throughput without requiring complex synchronization mechanisms.
Solution Approach 2:
The system changes the cycle time parameter individually for each unit block based on its specific processing characteristics. By measuring actual processing times and adjusting cycle times as parameters, the system optimizes throughput for each block independently, resolving the contradiction between simplified operation and reduced throughput.
2Manufacturing precision
If detailed transfer schedules are stored in memory for all unit blocks, then transfer precision is improved, but memory requirements increase
Solution Approach 1:
The patent extracts only the essential cycle time parameters from complete transfer schedules and stores these condensed parameters in memory. Instead of storing detailed step-by-step transfer schedules for all unit blocks, the system stores optimized cycle time values that can be used to generate schedules dynamically, significantly reducing memory requirements while maintaining transfer precision.
Solution Approach 2:
The system creates simplified copies of transfer schedule information in the form of cycle time parameters rather than storing complete schedule details. These parameter copies enable precise transfer control to be regenerated as needed without requiring large memory capacity for storing full schedule sequences.
3Stability of the object's composition
If cycle times are extended to accommodate slower unit blocks, then all blocks can operate synchronously, but waiting times increase in faster unit blocks
Solution Approach 1:
The patent implements dynamic cycle time configuration where each unit block operates with independently optimized cycle times rather than a fixed synchronous cycle. This allows faster unit blocks to complete their operations and wait minimally, while slower blocks operate at their optimal speed, reducing overall waiting time while maintaining system stability through coordinated control.
Data Source
AI summary
A substrate processing apparatus includes: a plurality of unit blocks, each having a plurality of modules for processing substrates and a substrate transfer path; a plurality of main transfer mechanisms, each being provided on the substrate transfer path, and configured to transfer the substrates among the plurality of modules; a loading and unloading transfer mechanism configured to load and unload the substrates with respect to each of the unit blocks; a memory configured to store substrate transfer history for each of the unit blocks; and a setting part configured to update a cycle time, which is a time required for a corresponding one of the main transfer mechanisms to move around the substrate transfer path once, of each of the unit blocks based on the substrate transfer history, and configured to set a transfer schedule of the substrates in each of the unit blocks based on the updated cycle time.