Dynamic Detector Segments in Particle Beam Analysis
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Solution Overview
Problem
Current particle beam apparatuses, such as electron and ion beam systems, face limitations in quickly recording high-resolution images with good contrast due to the fixed arrangement and low recording speed of detector segments, and the need to process and store large amounts of data.
Innovation Solution
A particle beam apparatus with a detector system that allows for the dynamic formation and selection of detector segments based on interaction behavior and solid angle regions, enabling rapid readout and analysis of specific regions of interest using a multiplicity of individually actuatable detection units and a control device, which can form and read detector segments arbitrarily.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a fixed arrangement of detector segments is used, then the device structure is simple, but the recording speed is low and flexibility is limited
Solution Approach 1:
The patent implements a dynamic detector segment system where segments can be flexibly formed, reconfigured, and selected based on the specific analysis requirements. The control device dynamically assigns detection units to different detector segments during operation, allowing the system to adapt to various imaging needs rather than being constrained by a fixed physical arrangement.
Solution Approach 2:
The detector is divided into a multiplicity of individually actuatable detection units that can be grouped into different detector segments. This segmentation allows the system to create multiple virtual detector segments from a single physical detector array, enabling flexible configuration without requiring multiple physical detector modules.
2Loss of information
If all detection units are used to form detector segments, then complete object information is captured, but data processing and storage requirements increase significantly
Solution Approach 1:
The patent extracts and processes only the relevant detection signals from the multiplicity of detection units based on the selected detector segment configuration. By forming specific detector segments that focus on regions of interest, the system extracts only the necessary data for the current analysis task, avoiding the need to process and store all data from every detection unit.
Solution Approach 2:
The system uses partial action by activating and reading out only the specific detection units that belong to the selected detector segment, rather than reading out all detection units. This partial readout approach reduces data processing and storage requirements while still capturing complete information about the region of interest.
3Adaptability or versatility
If detector segments are fixed in arrangement, then device manufacturing is simple, but adaptability to different analysis requirements is limited
Solution Approach 1:
The patent implements a universal detector system where a single physical detector array can serve multiple functions by dynamically forming different detector segments. The same detection units can be reconfigured to create different detector segments for various imaging modes and analysis requirements, eliminating the need for multiple specialized detector modules.
Solution Approach 2:
The system employs dynamic configuration of detector segments through software control, allowing the detector arrangement to be adapted to different analysis requirements without physical reconfiguration. The control device can programmatically assign different groups of detection units to form different detector segments based on the imaging task at hand.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid image generation and analysis of objects with high resolution and contrast, allowing for flexible detector segment configuration and efficient data processing, overcoming the limitations of existing systems.
Implementation Method 1
an electron beam (also referred to as primary electron beam below) is generated by means of a beam generator and focused on an object to be examined by way of a beam guiding system
Implementation Method 2
electrons are emitted by the object—the so-called secondary electrons
Implementation Method 3
electrons of the primary electron beam are scattered back—the so-called backscattered electrons
Data Source
AI summary
Described herein is a method for analyzing an object using a particle beam apparatus, for example an electron beam apparatus and/or an ion beam apparatus, or using an x-ray beam device and a particle beam apparatus or an x-ray beam device, by means of which the method is carried out. In the method, information about the object is loaded from a data memory into a control device. Furthermore, a group of detection units from the multiplicity of detection units is identified using the information loaded into the control device. A first detector segment is formed from the group of detection units using the control device. Interaction particles and/or interaction radiation, which is/are detected, is/are generated by guiding a particle beam onto the object and scanning the object using the particle beam, where a detector segment signal is read from the detector segment.