Dynamic Operating Authority for Substrate Processing Apparatus
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Solution Overview
Problem
Existing substrate processing apparatuses cannot set operating authorities based on the operating condition, leading to inefficiencies and increased downtime due to inappropriate user access during online and offline operations.
Innovation Solution
A substrate processing apparatus with a storage section for recipes and user authorities, and a display section for setting and editing these authorities based on online or offline conditions, allowing specific users to perform tasks according to the apparatus's status.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If operating authority is controlled by user name and password only, then user authentication is simple, but appropriate processing cannot be performed according to operating condition
Solution Approach 1:
The operating authority is made dynamic by linking it to the operating condition (online/offline) of the substrate processing apparatus. The authority setting section automatically determines which user group has authority based on whether the apparatus is in online or offline mode, making the authorization system adaptive to operational context rather than static.
Solution Approach 2:
Different operating authorities are assigned to different user groups based on their roles (line charge vs. maintenance engineer) and the specific operating condition. This allows appropriate personnel to have appropriate access rights in each context, with the authority setting section selecting the correct user group's authority based on the current operational state.
2Productivity
If maintenance engineer can access apparatus during online operation, then troubleshooting is faster, but errors may occur during normal production
Solution Approach 1:
The system dynamically adjusts user authority based on operational mode. When the apparatus is in online mode, only the line charge user group has authority, ensuring operational stability. When in offline mode, the maintenance engineer user group gains authority, enabling rapid troubleshooting without risking online production stability.
Solution Approach 2:
The authority setting section continuously monitors the operating condition (online/offline status) and automatically adjusts authorized user access accordingly. This feedback mechanism ensures that the correct user group has authority at the correct time, preventing unauthorized access during online operations while enabling maintenance access during offline operations.
3Productivity
If line charge operates apparatus during offline condition, then production continuity is maintained, but inappropriate processing may occur
Solution Approach 1:
The system dynamically restricts user authority based on operational mode. During offline operations, only maintenance engineers have authority, preventing line charge personnel from performing inappropriate processing even if they attempt to access the system. This ensures manufacturing precision is maintained by allowing only qualified personnel to operate during offline maintenance modes.
Data Source
AI summary
The object of the present invention is to provide a substrate processing apparatus and a substrate processing system capable of performing an appropriate processing in response to the operating condition of the substrate processing apparatus and of realizing an improvement in the availability rate of the apparatus. The substrate processing apparatus includes: storage section for storing a plurality of recipes describing a procedure for processing a substrate and operating authorities of a user corresponding to the plurality of recipes; and display section for displaying an authority setting screen for setting the operating authorities of the user to the respective recipes and an edition screen for editing a recipe stored in the storage section on the basis of the operating authority set via the authority setting screen. The substrate processing apparatus can edit the authority setting screen displayed by the display section and can set different operating authorities to the recipe between when the operating condition of the substrate processing apparatus is online and when the operating condition of the substrate processing apparatus is offline.