Dynamic Profile Measuring Apparatus with Time-Varying Light Source

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing profile measuring techniques face challenges in maintaining measurement accuracy due to variations in light intensity, often resulting in either saturation or insufficiency of imaging intensity, particularly when the light amount changes across different portions of an object.

Innovation Solution

A profile measuring apparatus that adjusts the exposure amount dynamically by changing the light intensity over time, using a light source device with a spatially distributed light pattern and an imaging element, to set an optimal exposure period based on the light amount and its change pattern, ensuring accurate measurement across varying object profiles.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the exposure time of the imaging element is adjusted to compensate for brightness changes, then the brightness of the image can be controlled, but the measurement accuracy decreases when light amount is insufficient or excessive

Engineering Contradiction:
Improvebrightness of imageVSAvoidmeasurement accuracy
Core Design Contradiction:
Illumination intensityVSMeasurement precision

Solution Approach 1:

The patent applies dynamics by making the light source intensity time-variable rather than constant. The light amount is changed in a predetermined pattern during the exposure period, allowing the imaging element to capture accurate profile information even when the average light amount would be insufficient or excessive. This dynamic adjustment resolves the contradiction by enabling accurate measurement without requiring the image brightness to be within a narrow range.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the parameter of light amount over time during the exposure period. By varying the light intensity according to a predetermined pattern, the system expands the effective dynamic range of measurement. This parameter change allows the imaging element to accurately capture profiles across a broader range of light conditions, resolving the contradiction between brightness control and measurement accuracy.

Inventive Principle:
Principle #35Parameter changes

2Illumination intensity

If the light amount of the projection light is increased to improve imaging brightness, then the image brightness improves, but measurement accuracy decreases due to saturation or insufficiency

Engineering Contradiction:
Improvelight amount of projection lightVSAvoidmeasurement accuracy
Core Design Contradiction:
Illumination intensityVSMeasurement precision

Solution Approach 1:

The patent applies periodic action by changing the light amount in a predetermined pattern during the exposure period. The light source intensity is varied periodically or in a controlled sequence, allowing different portions of the object to be illuminated at different intensity levels. This periodic variation enables accurate measurement across the entire dynamic range without saturation or insufficiency, resolving the contradiction between increasing light amount and maintaining measurement accuracy.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent makes the light source dynamic by varying its intensity over time according to a predetermined pattern. This dynamic illumination allows the system to capture accurate profile information across a wide range of light conditions, eliminating the need to choose between high light amount for brightness or low light amount for accuracy. The dynamic adjustment resolves the contradiction by enabling simultaneous optimization of both brightness and measurement accuracy.

Inventive Principle:
Principle #15Dynamics

3Device complexity

If a constant light source is used to simplify the system, then the device complexity is reduced, but measurement accuracy decreases due to inability to adapt to varying object profiles

Engineering Contradiction:
Improvelight source control complexityVSAvoidmeasurement accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent introduces dynamic control to the light source, varying its intensity according to a predetermined pattern during the exposure period. This dynamic capability allows the system to adapt to varying object profiles and lighting conditions, significantly improving measurement accuracy. While this increases control complexity, the benefits in measurement precision across different conditions justify the added complexity, resolving the contradiction between simplicity and accuracy.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the light source parameters (intensity, timing) according to a predetermined pattern to optimize measurement accuracy. By varying these parameters dynamically during exposure, the system can adapt to different object profiles and lighting conditions. This parameter change approach resolves the contradiction by enabling high measurement precision across diverse conditions, outweighing the increase in control complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach expands the adjustable range of exposure amounts, allowing for precise measurement by optimizing the exposure period according to local object profiles, thereby enhancing measurement accuracy and reducing errors caused by light intensity variations.

Implementation Method 1

an imaging element configured to take an image of the object to which the projection light is irradiated

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS9188432B2Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium
Publication Date: 2015.11.17 NIKON CORP
  • US9188432B2 patent drawing
  • US9188432B2 patent drawing
  • US9188432B2 patent drawing

AI summary

A profile measuring apparatus includes: a light source device from which a projection light is irradiated, the projection light having a light amount changing with lapse of time in a first period and a predetermined spatial distribution; an imaging element; a second period setting section which sets a second period including at least a part of the first period; and a profile information obtaining section which obtains an information of the profile of the object based on an image data taken by the imaging element in the second period. The second period setting section sets the second period based on a light amount of a light which comes into the imaging element at the time of an imaging performed before one imaging performed in the second period; and a light amount change pattern of the projection light changing with lapse of time in the first period.