Dynamic Quantity Sensor with Differential Movable Portions
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Solution Overview
Problem
Conventional force sensors face challenges in accurately detecting dynamic quantities, particularly in the Z-axis direction, due to poor temperature characteristics and low detection accuracy, which affects the overall precision of triaxial force measurement.
Innovation Solution
A dynamic quantity sensor design featuring a force receiving portion with two movable portions that rotate around distinct axes, allowing for differential detection of forces in multiple directions, enhancing detection accuracy and temperature stability through a seesaw structure and matrix operation of capacitive elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a conventional force sensor uses a simple detection scheme without differential measurement, then the structure becomes simpler, but detection accuracy deteriorates due to large offset capacity and poor linearity
Solution Approach 1:
The sensor divides the detection function into multiple independent capacitive elements (first and second capacitive elements) with distinct movable portions. Each element detects force in different directions, and their outputs are combined through matrix operation to achieve accurate triaxial force detection while maintaining structural simplicity
Solution Approach 2:
The movable portions serve multiple functions: they act as both the moving element of the capacitive sensor and the structural component that transmits force. The same movable portion that rotates around one axis also contributes to detecting force in another direction when viewed from a different perspective, reducing the need for additional separate components
2Measurement precision
If a conventional force sensor uses a reference electrode to reduce offset capacity, then detection accuracy improves, but temperature characteristics deteriorate due to asymmetrical electrode structure
Solution Approach 1:
The patent deliberately uses asymmetrical movable portions with different rotation axes and different capacitive element configurations. This controlled asymmetry allows each movable portion to specialize in detecting force in specific directions, and through matrix operation, achieves accurate triaxial detection while the asymmetrical structure itself becomes the solution to temperature stability by eliminating the need for symmetrical reference electrodes
3Measurement precision
If a conventional force sensor uses a differential detection scheme with symmetrical electrodes, then detection accuracy and temperature characteristics improve, but device complexity increases due to requiring three conductor layers
Solution Approach 1:
The sensor segments the capacitive detection into multiple independent elements with different movable portions rotating around different axes. This segmentation allows each element to be optimized for specific detection directions while the collective system achieves full triaxial detection capability without requiring three conductor layers
Solution Approach 2:
The patent introduces a new dimension of detection by having movable portions rotate around different axes (first rotational axis vs. second rotational axis) rather than using multiple conductor layers. This dimensional approach to force detection achieves triaxial measurement capability while maintaining a two-conductor-layer structure
4Adaptability or versatility
If a conventional sensor detects forces in triaxial direction, then it can perceive surrounding situation, but detection accuracy of Z-axis force deteriorates due to inability to perform differential detection
Solution Approach 1:
The sensor segments the Z-axis force detection function across multiple movable portions and capacitive elements. By having both movable portions respond to Z-axis force and using matrix operation on their combined outputs, the system achieves differential detection capability for the Z-axis without compromising triaxial detection versatility
Solution Approach 2:
The patent merges the detection responses from multiple movable portions and capacitive elements through matrix operation. This combining of detection signals from different measurement paths enables differential detection of Z-axis force while maintaining the ability to detect forces in all three directions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves accurate detection of forces in all triaxial directions, improving detection precision and resistance to temperature variations, while maintaining a robust and sealed structure to prevent foreign matter intrusion.
Implementation Method 1
a first movable portion that rotates in a first rotational direction around a first rotational axis according to dynamic quantity in a first direction that the force receiving portion receives
Data Source
AI summary
A dynamic quantity sensor includes a force receiving portion, a first movable portion that rotates in a first rotational direction around a first rotational axis according to dynamic quantity in a first direction that the force receiving portion receives, and rotates in the first rotational direction around the first rotational axis according to dynamic quantity in a second direction different from the first direction that the force receiving portion receives; and a second movable portion that rotates in a second rotational direction around a second rotational axis according to the dynamic quantity in the first direction that the force receiving portion receives, and rotates in an opposite direction to the second rotational direction around the second rotational axis according to the dynamic quantity in the second direction that the force receiving portion receives.