Dynamic Recipe Substitution for Semiconductor Processing Throughput
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Solution Overview
Problem
Existing substrate processing apparatuses face reduced operating rates and throughput due to the inability to handle events that cannot be managed by tuning recipe data, leading to unavoidable stops in substrate processing.
Innovation Solution
A method for dynamically adjusting the substrate processing schedule by detecting the status of processing units and transporting means, allowing for the substitution of recipes and subsequent resetting of schedules to accommodate changing conditions, thereby enabling continuous operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If recipe data is tuned based on sensor output, then substrate process quality is improved, but operating rate and throughput deteriorate due to unavoidable stops when events cannot be handled by recipe tuning
Solution Approach 1:
The patent applies dynamics by making the substrate processing schedule flexible and adaptable rather than fixed. The schedule is dynamically reset based on detected status changes in processing units, allowing the system to respond to events in real-time without stopping operations. This dynamic scheduling enables the system to maintain both high quality through recipe tuning and high throughput by automatically adjusting schedules when events occur.
Solution Approach 2:
The patent implements feedback mechanisms where the status of processing units is continuously detected and monitored. Based on this feedback information, the system determines whether recipe substitution is necessary and resets the processing schedule accordingly. This closed-loop feedback system allows the apparatus to automatically adapt to events while maintaining both quality standards and operational continuity, resolving the contradiction between precision and productivity.
2Ease of operation
If the substrate processing schedule is fixed, then operational simplicity is maintained, but throughput deteriorates due to stops when events require handling
Solution Approach 1:
The patent applies self-service by enabling the substrate processing apparatus to automatically detect status changes, determine the necessity of recipe substitution, and reset schedules without external intervention. The system serves itself by autonomously responding to events, maintaining operational simplicity while preventing throughput reduction. This automated self-adjustment eliminates the need for manual schedule modifications while ensuring continuous high-speed processing.
3Adaptability or versatility
If recipe substitution capability is added to handle events, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent applies universality by designing a multi-functional control system that integrates recipe identification, status detection, substitution necessity determination, and schedule resetting functions into a unified apparatus. This universal system can handle various types of events (nozzle abnormalities, substrate transport issues, processing unit failures) using a common framework, thereby improving adaptability without proportionally increasing complexity. The control unit serves multiple purposes: monitoring, decision-making, and execution of schedule adjustments.
4Productivity
If continuous operation is maintained through schedule resetting, then throughput is improved, but loss of time increases due to recipe substitution operations
Solution Approach 1:
The patent applies preliminary action by preparing multiple recipes in advance and having the control unit pre-evaluate substitution possibilities. When an event occurs, the system can quickly determine the appropriate recipe substitution without extensive processing time. The schedule resetting mechanism is also pre-configured to execute efficiently, minimizing the time penalty for maintaining continuous operation. This preparatory approach ensures that recipe substitution and schedule resetting can be performed rapidly, preserving high throughput.
Data Source
AI summary
A technique to prevent reduction in throughput of a substrate processing apparatus. On the occurrence of an event disabling execution of a recipe by a processing unit, a different recipe executed by this processing unit may be used depending on the type of event having occurred. The type of event to occur and a substitute recipe that can take the place of a recipe being executed are associated in advance. On the occurrence of abnormality, it is determined whether or not a recipe being executed can be substituted by a different recipe. If the recipe can be substituted, it is determined whether or not the substitute recipe is contained in an unfinished job. If these conditions are satisfied, a substrate processing schedule is changed to execute the substitute recipe in this processing unit. If these conditions are not satisfied, substrate process in this processing unit is stopped.