Dynamic Sensor Sampling Rate Adjustment for APC Systems
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Solution Overview
Problem
Conventional Advanced Process Control (APC) systems in semiconductor manufacturing are limited in their ability to dynamically adjust sensor sampling rates in response to changing conditions and bandwidths, which can hinder fault detection and classification due to network overload when all sensors continuously transmit data.
Innovation Solution
A method and apparatus for dynamically adjusting sensor sampling rates based on tool trace data and network bandwidth, allowing for increased sampling rates of relevant sensors to enhance fault detection while reducing sampling rates of less critical sensors to maintain network bandwidth.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If all sensors continuously collect and transmit tool trace data, then measurement precision and fault detection capability are improved, but network bandwidth is exceeded causing system overload
Solution Approach 1:
The patent implements dynamic adjustment of sensor sampling rates based on real-time network bandwidth conditions and fault detection needs. The system transitions from static predetermined sampling rates to dynamic adaptive sampling rates, allowing sensors to operate at higher rates when bandwidth is available and faults are suspected, and at lower rates when bandwidth is constrained, thereby resolving the contradiction between measurement precision and network bandwidth consumption
Solution Approach 2:
The system changes the sampling rate parameter of sensors based on monitored network bandwidth conditions and tool operating states. By dynamically adjusting this key parameter, the system optimizes the balance between data quality for fault detection and network bandwidth utilization, preventing system overload while maintaining adequate monitoring capability
2Quantity of substance
If a predetermined data collection plan with fixed sampling rates is used, then network bandwidth is managed, but the ability to detect and classify faults is limited
Solution Approach 1:
The patent implements a feedback mechanism where the APC system continuously monitors tool trace data and network bandwidth conditions, then uses this information to dynamically adjust sensor sampling rates. The feedback loop enables the system to respond to changing conditions by increasing sampling rates when faults are detected or suspected, and decreasing rates when conditions are normal, thereby maintaining fault detection reliability while managing network bandwidth
Solution Approach 2:
The system transforms the static predetermined data collection plan into a dynamic adaptive plan that responds to real-time conditions. By making sampling rates adjustable based on monitored parameters, the system maintains reliability for fault detection while adapting to network bandwidth constraints, resolving the contradiction between fixed bandwidth management and flexible fault detection needs
Data Source
AI summary
The present invention provides a method and apparatus for dynamic adjustment of a sensor sampling rate. The method includes providing a data collection plan indicative of at least one first sampling rate for at least one sensor associated with at least one processing tool, receiving tool trace data from the at least one sensor via a network, and modifying, based on the tool trace data and a bandwidth associated with the network, the data collection plan to indicate at least one second sampling rate different from a corresponding at least one first sampling rate.