Dynamic Spray Control for Raw Material Sublimation
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Solution Overview
Problem
Existing techniques for sublimating solid raw materials in processing chambers are limited in increasing the sublimation rate, which affects the efficiency of generating reactive gases for film formation and other processing applications.
Innovation Solution
A raw material supply device with a container, injector, and controller that sprays a solution or dispersion of the solid raw material into a processing chamber, allowing for temporal changes in spray direction and conditions to enhance the sublimation rate by increasing the specific surface area of the solid raw material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a solid raw material is directly heated for sublimation, then the process is simple, but the sublimation rate is low
Solution Approach 1:
The patent changes the physical state of the raw material from solid to dissolved state in a solvent, then uses spray drying to create liquid droplets that rapidly evaporate the solvent, leaving behind solid particles with high specific surface area. This parameter change from direct solid heating to solution spraying enables much faster sublimation rates.
Solution Approach 2:
The patent segments the raw material into fine particles through spray drying, creating numerous small droplets that evaporate simultaneously. This segmentation increases the total surface area available for sublimation, dramatically improving the sublimation rate compared to heating a single solid block.
2Area of stationary object
If the spray direction is fixed, then the device structure is simple, but the deposition area is limited
Solution Approach 1:
The patent makes the spray direction dynamic by enabling the injector to change spray directions over time. The controller adjusts the spray direction to cover different areas of the processing chamber, ensuring uniform deposition across a wide area rather than concentrating material in one location.
Solution Approach 2:
The patent employs periodic changes in spray direction, where the injector alternates between different spray angles and positions. This periodic action ensures that material is distributed uniformly across the entire deposition area, preventing localized accumulation and achieving consistent film thickness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively increases the sublimation rate of solid raw materials, improving the efficiency of reactive gas generation and film formation processes by ensuring uniform deposition over a wide area within the chamber.
Implementation Method 1
an injector configured to spray the solution or the dispersion to inject the solution or the dispersion into the container
Implementation Method 2
heating the inside of the processing chamber to remove the solvent and leave the solid raw material
Implementation Method 3
heating the inside of the processing chamber to sublimate the solid raw material, thereby generating a corresponding gas
Data Source
AI summary
A raw material supply device includes: a container configured to store a solution in which a solid raw material is dissolved in a solvent or a dispersion in which the solid raw material is dispersed in a dispersion medium; an injector configured to spray the solution or the dispersion to inject the solution or the dispersion into the container; and a controller configured to control a spray condition so as to change a spray direction of the solution or the dispersion sprayed from the injector over time.