Dynamic Subprocess Scheduling for Semiconductor Cleaning
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Solution Overview
Problem
In semiconductor device manufacturing, existing techniques lack flexibility in setting the order and timing of processes, which affects manufacturing efficiency when multiple processes are serially executed.
Innovation Solution
A method that serially executes multiple processes, including a main process and subprocesses, where the execution of subprocesses is determined by cumulative index values and conditions, allowing for flexible adjustment of process order and timing based on accumulated values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas cleaning is performed for every single lot, then cleaning effectiveness is improved, but manufacturing throughput deteriorates
Solution Approach 1:
The patent implements dynamic adjustment of cleaning frequency based on accumulated index values from process execution. Instead of fixed single-lot cleaning, the system adapts cleaning timing by accumulating process indices and triggering cleaning when thresholds are met, allowing flexible adjustment between aggressive cleaning (every lot) and extended intervals (every two or more lots) to balance effectiveness and throughput
Solution Approach 2:
The system changes the parameter of cleaning frequency from a fixed value (every single lot) to a variable determined by cumulative index values. By monitoring and accumulating process indices over multiple lots, the system dynamically determines when cleaning should occur, transforming the cleaning schedule from static to adaptive based on actual process conditions
2Reliability
If cleaning is performed according to fixed process types, then cleaning coverage is improved, but flexibility in process execution deteriorates
Solution Approach 1:
The patent replaces fixed process-type-based cleaning schedules with dynamic index-value-based triggering. The system accumulates indices from various process executions and triggers cleaning based on cumulative thresholds, enabling adaptive response to actual process conditions rather than rigid pre-defined cleaning schedules for specific process types
Solution Approach 2:
The unified index accumulation mechanism serves multiple functions: it tracks process execution across different process types, determines cleaning timing, and enables flexible scheduling. This universal index system replaces multiple specialized cleaning schedules for different process types with a single adaptive framework that handles diverse processes uniformly
3Stability of the object's composition
If multiple processes are serially executed with fixed order, then process stability is improved, but manufacturing efficiency deteriorates
Solution Approach 1:
The system implements dynamic process scheduling by accumulating indices during serial execution and using these accumulated values to determine optimal timing for subprocess execution and cleaning operations. This allows the process sequence to adapt based on accumulated process states, improving efficiency while maintaining stability through systematic index-based control
Solution Approach 2:
The patent introduces periodic cleaning actions triggered by accumulated index thresholds rather than continuous or fixed-interval cleaning. By accumulating process indices over multiple executions and triggering cleaning periodically when thresholds are met, the system optimizes the timing of cleaning operations within the serial process sequence
Data Source
AI summary
A method of processing a target substrate includes a process of serially executing multiple processes including a main process and first to M-th subprocesses (where M is a positive integer). An index value indicating one execution of the main process is accumulated for each execution of the main process. The main process is executed multiple times in the process of serially executing multiple processes. An i-th subprocess (where i is a positive integer that satisfies 1≤i≤M) is executed once or multiple times in the process of serially executing multiple processes, and is executed subsequent to one or multiple consecutive executions of the main process. The i-th application and execution conditions are changeable.