Dynamic Width Space Patterns for Complex DRC Compliance
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Solution Overview
Problem
Conventional electronic design automation (EDA) tools struggle to ensure design rule compliance for integrated circuits, particularly at advanced nodes (10 nm and below, where complex track systems and multiple patterning processes require adherence to various design rules beyond simple width and spacing constraints.
Innovation Solution
The implementation of Dynamic Width Space Patterns (DWSPs) that adjust dynamically based on neighboring geometries and design rules, providing visual indicators and alerts to designers to ensure compliance with complex design rules such as maximum length, end-to-end spacing, and parallel run length rules during the design and editing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If fixed width-space patterns are used for track-based design, then design simplicity is maintained, but design rule compliance cannot be guaranteed for complex constraints
Solution Approach 1:
The patent implements dynamic width-space patterns that automatically adjust their parameters based on the specific track configuration and applicable design rules. Instead of using fixed patterns, the system dynamically modifies width and spacing values to ensure compliance with complex design rules including maximum length, end-to-end spacing, and parallel run length constraints, thereby resolving the contradiction between maintaining simplicity and ensuring compliance.
Solution Approach 2:
The system changes the parameters of width-space patterns dynamically based on design rule requirements. When design rules such as maximum length or end-to-end spacing are detected, the patent modifies the corresponding pattern parameters (width, spacing, length) to satisfy these constraints, enabling design rule compliance without requiring completely complex fixed patterns.
2Manufacturing precision
If conventional EDA tools are used, then basic width and spacing constraints are enforced, but complex design rules at advanced nodes cannot be ensured
Solution Approach 1:
The patent enables the EDA tool to automatically detect applicable design rules and self-adjust the width-space pattern parameters without requiring manual intervention from the designer. The system services itself by autonomously ensuring compliance with complex design rules, thereby maintaining ease of operation while achieving high manufacturing precision for advanced node requirements.
Solution Approach 2:
The system implements a feedback mechanism where the EDA tool continuously monitors the design against complex design rules and automatically adjusts width-space patterns based on detected violations or potential violations. This closed-loop feedback ensures compliance with maximum length, end-to-end spacing, and parallel run length rules while keeping the design process straightforward for users.
3Manufacturing precision
If dynamic width-space patterns are implemented, then design rule compliance is ensured, but computational overhead increases
Solution Approach 1:
The patent performs preliminary detection of applicable design rules and pre-calculates appropriate width-space pattern parameters before final design decisions are made. By anticipating design rule requirements and preparing appropriate patterns in advance, the system minimizes computational overhead during the actual design process, thereby reducing time loss while ensuring compliance.
Data Source
AI summary
Embodiments according to the present disclosure relate to physically implementing an integrated circuit design using track patterns while conforming to the requirements of complex color based track systems, and using information about instances that have been included in the design. According to some aspects, the present embodiments provide “Dynamic Width Space Patterns (DWSP)” which are WSPs that are modified dynamically in consideration of neighboring geometries such that shapes created or edited using WSPs are design rule compliant. Embodiments can include providing visual indicators in a display of a portion of a design that is being created or edited, as well as possibly other alerts, so as assist a designer in creating a design rule compliant integrated circuit design that is also subject to WSPs.