Dynamic Wire Feed Mechanism for Automated Sample Lift-Out

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Solution Overview

Problem

Existing sample manipulation systems for charged particle microscopes face challenges in automating the lift-out process of samples, particularly due to the need for frequent wire replacements and the time-consuming process of reducing wire diameter after each use.

Innovation Solution

A sample manipulation system that includes a carrier with a passageway, a wire with a supported and protruding portion, and a feed mechanism. The feed mechanism drives the wire through the passageway to control the length of the protruding portion, allowing for continuous use without the need for frequent replacements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a wire is used for sample manipulation in charged particle microscope, then the sample can be manipulated and transferred, but the wire diameter must be reduced after each use requiring frequent replacements

Engineering Contradiction:
Improvesample manipulation throughputVSAvoidtime for wire replacement and diameter reduction
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The wire manipulation system transitions from static fixed-length wires to dynamic adjustable-length wires. The feed mechanism enables continuous wire feeding and length adjustment, allowing the wire to extend as it is consumed during manipulation tasks, thereby eliminating the need for frequent replacements and diameter reduction operations.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system pre-provides a long wire that can be fed continuously through the carrier. Instead of preparing and replacing short wires after each use, the long wire is prepared in advance and can serve multiple manipulation tasks, significantly reducing the frequency of wire replacements and the time associated with diameter reduction operations.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If wire diameter is reduced after each use, then the wire can be reused, but the process is time-consuming

Engineering Contradiction:
Improvewire reusabilityVSAvoidpost-use processing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The invention extracts the diameter reduction step from the wire reuse process. Instead of reducing wire diameter after each use, the system feeds new wire length through the carrier, effectively removing the time-consuming diameter reduction operation while maintaining wire reusability for multiple manipulation tasks.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The system pre-provides a long wire that can be fed continuously through the carrier. Instead of preparing and replacing short wires after each use, the long wire is prepared in advance and can serve multiple manipulation tasks, significantly reducing the frequency of wire replacements and the time associated with diameter reduction operations.

Inventive Principle:
Principle #10Preliminary action

3Loss of substance

If frequent wire replacements are performed, then wire consumption is managed, but system efficiency decreases

Engineering Contradiction:
Improvewire consumptionVSAvoidlift-out process throughput
Core Design Contradiction:
Loss of substanceVSProductivity

Solution Approach 1:

The feed mechanism enables continuous wire feeding during the manipulation process. The wire can be extended as it is consumed, maintaining continuous useful action without interruption for wire replacement. This continuity significantly improves lift-out process throughput while managing wire consumption efficiently.

Inventive Principle:
Principle #20Continuity of useful action

Data Source

PatentUS20250022677A1Apparatus and method for manipulating a microscopic sample
Publication Date: 2025.01.16 FEI CO
  • US20250022677A1 patent drawing
  • US20250022677A1 patent drawing
  • US20250022677A1 patent drawing

AI summary

A sample manipulation system for a sample to be used in a charged particle beam process. The sample manipulation system includes a carrier defining a passageway, a wire slidably supported and at least partially housed by the carrier, and a feed mechanism. The wire is configured to slide through the passageway. The wire includes a supported portion and a protruding portion. The supported portion is disposed in the passageway and the protruding portion extends from the carrier for engaging the sample. The feed mechanism is configured to drive the wire through the passageway to control a length of the protruding portion.